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- W2000739845 abstract "In this paper, we evaluate several approaches for proximity matching on a 193nm scanner system such as image contrast tuning, illumination tuning and photoresist tuning. Both experimental and simulation studies are carried out to reveal the differences between approaches. We find that it is very important to determine the root cause of proximity mismatch before attempting proximity matching, and that spectroscopic scatterometry is an excellent tool for OPC tuning" @default.
- W2000739845 created "2016-06-24" @default.
- W2000739845 creator A5007433531 @default.
- W2000739845 creator A5018523283 @default.
- W2000739845 creator A5027073691 @default.
- W2000739845 creator A5049877714 @default.
- W2000739845 creator A5054850272 @default.
- W2000739845 creator A5088930878 @default.
- W2000739845 date "2005-05-12" @default.
- W2000739845 modified "2023-09-27" @default.
- W2000739845 title "Proximity matching for 193 nm scanner using scatterometry" @default.
- W2000739845 doi "https://doi.org/10.1117/12.601574" @default.
- W2000739845 hasPublicationYear "2005" @default.
- W2000739845 type Work @default.
- W2000739845 sameAs 2000739845 @default.
- W2000739845 citedByCount "3" @default.
- W2000739845 crossrefType "proceedings-article" @default.
- W2000739845 hasAuthorship W2000739845A5007433531 @default.
- W2000739845 hasAuthorship W2000739845A5018523283 @default.
- W2000739845 hasAuthorship W2000739845A5027073691 @default.
- W2000739845 hasAuthorship W2000739845A5049877714 @default.
- W2000739845 hasAuthorship W2000739845A5054850272 @default.
- W2000739845 hasAuthorship W2000739845A5088930878 @default.
- W2000739845 hasConcept C105487726 @default.
- W2000739845 hasConcept C105795698 @default.
- W2000739845 hasConcept C120665830 @default.
- W2000739845 hasConcept C121332964 @default.
- W2000739845 hasConcept C134406635 @default.
- W2000739845 hasConcept C154945302 @default.
- W2000739845 hasConcept C165064840 @default.
- W2000739845 hasConcept C171250308 @default.
- W2000739845 hasConcept C192562407 @default.
- W2000739845 hasConcept C2776502983 @default.
- W2000739845 hasConcept C2779227376 @default.
- W2000739845 hasConcept C2779751349 @default.
- W2000739845 hasConcept C3018302497 @default.
- W2000739845 hasConcept C31972630 @default.
- W2000739845 hasConcept C33923547 @default.
- W2000739845 hasConcept C41008148 @default.
- W2000739845 hasConcept C78371743 @default.
- W2000739845 hasConceptScore W2000739845C105487726 @default.
- W2000739845 hasConceptScore W2000739845C105795698 @default.
- W2000739845 hasConceptScore W2000739845C120665830 @default.
- W2000739845 hasConceptScore W2000739845C121332964 @default.
- W2000739845 hasConceptScore W2000739845C134406635 @default.
- W2000739845 hasConceptScore W2000739845C154945302 @default.
- W2000739845 hasConceptScore W2000739845C165064840 @default.
- W2000739845 hasConceptScore W2000739845C171250308 @default.
- W2000739845 hasConceptScore W2000739845C192562407 @default.
- W2000739845 hasConceptScore W2000739845C2776502983 @default.
- W2000739845 hasConceptScore W2000739845C2779227376 @default.
- W2000739845 hasConceptScore W2000739845C2779751349 @default.
- W2000739845 hasConceptScore W2000739845C3018302497 @default.
- W2000739845 hasConceptScore W2000739845C31972630 @default.
- W2000739845 hasConceptScore W2000739845C33923547 @default.
- W2000739845 hasConceptScore W2000739845C41008148 @default.
- W2000739845 hasConceptScore W2000739845C78371743 @default.
- W2000739845 hasLocation W20007398451 @default.
- W2000739845 hasOpenAccess W2000739845 @default.
- W2000739845 hasPrimaryLocation W20007398451 @default.
- W2000739845 hasRelatedWork W1969449762 @default.
- W2000739845 hasRelatedWork W1977373830 @default.
- W2000739845 hasRelatedWork W1987421842 @default.
- W2000739845 hasRelatedWork W1995188412 @default.
- W2000739845 hasRelatedWork W2000739845 @default.
- W2000739845 hasRelatedWork W2121179941 @default.
- W2000739845 hasRelatedWork W2128391139 @default.
- W2000739845 hasRelatedWork W2165509409 @default.
- W2000739845 hasRelatedWork W2179301249 @default.
- W2000739845 hasRelatedWork W2391245565 @default.
- W2000739845 isParatext "false" @default.
- W2000739845 isRetracted "false" @default.
- W2000739845 magId "2000739845" @default.
- W2000739845 workType "article" @default.