Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000744118> ?p ?o ?g. }
Showing items 1 to 78 of
78
with 100 items per page.
- W2000744118 abstract "Abstract An online monitor of heavy ion flux for semiconductor irradiation test was developed and tested. The monitor consists of four annular-shaped segmented secondary electron emission monitors (S-SEMs) arranged in a quadrature around the central area of a beam line. Each SEM detects heavy ions diffused to the outer side from the center of the beam by a scatterer to expand the beam size without interference with the central part of the beam. Each SEM is independent, then the count of each SEM reflects the beam position or profile. Therefore, the device can be used as an online monitor for beam intensity and position. The device is named S-SEM. S-SEM was installed in an ion irradiation apparatus for semiconductor devices at the Tohoku University K=110 AVF cyclotron. We tested its performance and demonstrated that the S-SEM enables us to monitor the heavy ion flux down to lower than 104 #/cm2 s, without any energy loss to the beam. Further, S-SEM provides information on the beam position in both vertical and horizontal directions as expected." @default.
- W2000744118 created "2016-06-24" @default.
- W2000744118 creator A5001410043 @default.
- W2000744118 creator A5009975633 @default.
- W2000744118 creator A5023707102 @default.
- W2000744118 creator A5084398824 @default.
- W2000744118 date "2008-05-01" @default.
- W2000744118 modified "2023-10-01" @default.
- W2000744118 title "Online monitor of heavy ion flux in an ion irradiation apparatus for semiconductor irradiation test" @default.
- W2000744118 cites W1986431777 @default.
- W2000744118 cites W2072372202 @default.
- W2000744118 doi "https://doi.org/10.1016/j.nima.2008.02.064" @default.
- W2000744118 hasPublicationYear "2008" @default.
- W2000744118 type Work @default.
- W2000744118 sameAs 2000744118 @default.
- W2000744118 citedByCount "0" @default.
- W2000744118 crossrefType "journal-article" @default.
- W2000744118 hasAuthorship W2000744118A5001410043 @default.
- W2000744118 hasAuthorship W2000744118A5009975633 @default.
- W2000744118 hasAuthorship W2000744118A5023707102 @default.
- W2000744118 hasAuthorship W2000744118A5084398824 @default.
- W2000744118 hasConcept C108225325 @default.
- W2000744118 hasConcept C111337013 @default.
- W2000744118 hasConcept C120665830 @default.
- W2000744118 hasConcept C121332964 @default.
- W2000744118 hasConcept C145148216 @default.
- W2000744118 hasConcept C168834538 @default.
- W2000744118 hasConcept C185544564 @default.
- W2000744118 hasConcept C191897082 @default.
- W2000744118 hasConcept C192562407 @default.
- W2000744118 hasConcept C26771246 @default.
- W2000744118 hasConcept C39527238 @default.
- W2000744118 hasConcept C49040817 @default.
- W2000744118 hasConcept C50774322 @default.
- W2000744118 hasConcept C62520636 @default.
- W2000744118 hasConcept C68709404 @default.
- W2000744118 hasConceptScore W2000744118C108225325 @default.
- W2000744118 hasConceptScore W2000744118C111337013 @default.
- W2000744118 hasConceptScore W2000744118C120665830 @default.
- W2000744118 hasConceptScore W2000744118C121332964 @default.
- W2000744118 hasConceptScore W2000744118C145148216 @default.
- W2000744118 hasConceptScore W2000744118C168834538 @default.
- W2000744118 hasConceptScore W2000744118C185544564 @default.
- W2000744118 hasConceptScore W2000744118C191897082 @default.
- W2000744118 hasConceptScore W2000744118C192562407 @default.
- W2000744118 hasConceptScore W2000744118C26771246 @default.
- W2000744118 hasConceptScore W2000744118C39527238 @default.
- W2000744118 hasConceptScore W2000744118C49040817 @default.
- W2000744118 hasConceptScore W2000744118C50774322 @default.
- W2000744118 hasConceptScore W2000744118C62520636 @default.
- W2000744118 hasConceptScore W2000744118C68709404 @default.
- W2000744118 hasLocation W20007441181 @default.
- W2000744118 hasOpenAccess W2000744118 @default.
- W2000744118 hasPrimaryLocation W20007441181 @default.
- W2000744118 hasRelatedWork W2034864593 @default.
- W2000744118 hasRelatedWork W2060150141 @default.
- W2000744118 hasRelatedWork W2067415332 @default.
- W2000744118 hasRelatedWork W2077876397 @default.
- W2000744118 hasRelatedWork W2119709000 @default.
- W2000744118 hasRelatedWork W2146328350 @default.
- W2000744118 hasRelatedWork W2149888469 @default.
- W2000744118 hasRelatedWork W2186172364 @default.
- W2000744118 hasRelatedWork W2346251244 @default.
- W2000744118 hasRelatedWork W2558488107 @default.
- W2000744118 hasRelatedWork W2600072834 @default.
- W2000744118 hasRelatedWork W2742895766 @default.
- W2000744118 hasRelatedWork W3134845123 @default.
- W2000744118 hasRelatedWork W2003727979 @default.
- W2000744118 hasRelatedWork W2778539200 @default.
- W2000744118 hasRelatedWork W2781102947 @default.
- W2000744118 hasRelatedWork W2857889496 @default.
- W2000744118 hasRelatedWork W2874289076 @default.
- W2000744118 hasRelatedWork W2879216868 @default.
- W2000744118 hasRelatedWork W3145497463 @default.
- W2000744118 isParatext "false" @default.
- W2000744118 isRetracted "false" @default.
- W2000744118 magId "2000744118" @default.
- W2000744118 workType "article" @default.