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- W2000753411 endingPage "382" @default.
- W2000753411 startingPage "380" @default.
- W2000753411 abstract "Low-temperature activation of dopants in amorphous silicon films was achieved by a new method and high-performance polycrystalline silicon thin film transistors were fabricated through its application. It was found that the dopants implanted into amorphous silicon were activated simultaneously with the crystallization of amorphous silicon. With the help of a thin nickel layer, the thermal budget for dopant activation and crystallization was considerably reduced, from 600 °C (30 h) to 500 °C (5 h). Even without plasma hydrogenation, the n-channel polycrystalline silicon thin film transistors fabricated at temperatures below 500 °C showed a mobility of 120 cm2/V s, which is much higher than that of conventional devices fabricated at 600 °C." @default.
- W2000753411 created "2016-06-24" @default.
- W2000753411 creator A5032288145 @default.
- W2000753411 creator A5049667479 @default.
- W2000753411 creator A5076428469 @default.
- W2000753411 date "1996-07-15" @default.
- W2000753411 modified "2023-10-15" @default.
- W2000753411 title "Low-temperature dopant activation and its application to polycrystalline silicon thin film transistors" @default.
- W2000753411 doi "https://doi.org/10.1063/1.118067" @default.
- W2000753411 hasPublicationYear "1996" @default.
- W2000753411 type Work @default.
- W2000753411 sameAs 2000753411 @default.
- W2000753411 citedByCount "22" @default.
- W2000753411 countsByYear W20007534112012 @default.
- W2000753411 countsByYear W20007534112013 @default.
- W2000753411 countsByYear W20007534112017 @default.
- W2000753411 crossrefType "journal-article" @default.
- W2000753411 hasAuthorship W2000753411A5032288145 @default.
- W2000753411 hasAuthorship W2000753411A5049667479 @default.
- W2000753411 hasAuthorship W2000753411A5076428469 @default.
- W2000753411 hasConcept C127413603 @default.
- W2000753411 hasConcept C171250308 @default.
- W2000753411 hasConcept C185592680 @default.
- W2000753411 hasConcept C19067145 @default.
- W2000753411 hasConcept C191952053 @default.
- W2000753411 hasConcept C192562407 @default.
- W2000753411 hasConcept C203036418 @default.
- W2000753411 hasConcept C2776390347 @default.
- W2000753411 hasConcept C2779227376 @default.
- W2000753411 hasConcept C2779667780 @default.
- W2000753411 hasConcept C2780081452 @default.
- W2000753411 hasConcept C2780565262 @default.
- W2000753411 hasConcept C42360764 @default.
- W2000753411 hasConcept C49040817 @default.
- W2000753411 hasConcept C544956773 @default.
- W2000753411 hasConcept C56052488 @default.
- W2000753411 hasConcept C57863236 @default.
- W2000753411 hasConcept C80086925 @default.
- W2000753411 hasConcept C8010536 @default.
- W2000753411 hasConcept C87359718 @default.
- W2000753411 hasConceptScore W2000753411C127413603 @default.
- W2000753411 hasConceptScore W2000753411C171250308 @default.
- W2000753411 hasConceptScore W2000753411C185592680 @default.
- W2000753411 hasConceptScore W2000753411C19067145 @default.
- W2000753411 hasConceptScore W2000753411C191952053 @default.
- W2000753411 hasConceptScore W2000753411C192562407 @default.
- W2000753411 hasConceptScore W2000753411C203036418 @default.
- W2000753411 hasConceptScore W2000753411C2776390347 @default.
- W2000753411 hasConceptScore W2000753411C2779227376 @default.
- W2000753411 hasConceptScore W2000753411C2779667780 @default.
- W2000753411 hasConceptScore W2000753411C2780081452 @default.
- W2000753411 hasConceptScore W2000753411C2780565262 @default.
- W2000753411 hasConceptScore W2000753411C42360764 @default.
- W2000753411 hasConceptScore W2000753411C49040817 @default.
- W2000753411 hasConceptScore W2000753411C544956773 @default.
- W2000753411 hasConceptScore W2000753411C56052488 @default.
- W2000753411 hasConceptScore W2000753411C57863236 @default.
- W2000753411 hasConceptScore W2000753411C80086925 @default.
- W2000753411 hasConceptScore W2000753411C8010536 @default.
- W2000753411 hasConceptScore W2000753411C87359718 @default.
- W2000753411 hasIssue "3" @default.
- W2000753411 hasLocation W20007534111 @default.
- W2000753411 hasOpenAccess W2000753411 @default.
- W2000753411 hasPrimaryLocation W20007534111 @default.
- W2000753411 hasRelatedWork W2000753411 @default.
- W2000753411 hasRelatedWork W2080780819 @default.
- W2000753411 hasRelatedWork W2083321254 @default.
- W2000753411 hasRelatedWork W2091224902 @default.
- W2000753411 hasRelatedWork W2122987424 @default.
- W2000753411 hasRelatedWork W2145041847 @default.
- W2000753411 hasRelatedWork W2164209798 @default.
- W2000753411 hasRelatedWork W2390094644 @default.
- W2000753411 hasRelatedWork W2543394437 @default.
- W2000753411 hasRelatedWork W4252272975 @default.
- W2000753411 hasVolume "69" @default.
- W2000753411 isParatext "false" @default.
- W2000753411 isRetracted "false" @default.
- W2000753411 magId "2000753411" @default.
- W2000753411 workType "article" @default.