Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000758853> ?p ?o ?g. }
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with 100 items per page.
- W2000758853 endingPage "1005" @default.
- W2000758853 startingPage "1001" @default.
- W2000758853 abstract "Time resolved microwave conductivity (TRMC) provides the product of the number of free carriers, generated by a laser pulse, by their mobility. A TRMC set-up is implemented in situ together with ultraviolet (UV) visible spectroscopic ellipsometry to analyze and optimize the growth of microcrystalline silicon (μc-Si) by conventional radio frequency discharges. The modelling of TRMC experiment is presented, including numerical simulations of microwave reflectivity, and carrier generation and recombination kinetics. Various materials are analyzed. For the material obtained from SiF4–H2 mixtures, the recombination lifetime varies with the power −0.5 of the carrier density, and the best effective mobility is μeff=25(±5) cm2 V−1 s−1. The set-up allows quantitative comparisons with other materials. For μc-Si films deposited by the integrated distributed electron cyclotron resonance (IDECR) technique, we observe a bimolecular recombination at high laser fluence, followed by a monomolecular one. The effective mobility is μeff=6(±2) cm2 V−1 s−1." @default.
- W2000758853 created "2016-06-24" @default.
- W2000758853 creator A5032522110 @default.
- W2000758853 creator A5052833091 @default.
- W2000758853 creator A5066921816 @default.
- W2000758853 creator A5067440332 @default.
- W2000758853 creator A5074560940 @default.
- W2000758853 date "1998-05-01" @default.
- W2000758853 modified "2023-10-18" @default.
- W2000758853 title "In situ characterization of microcrystalline silicon by time resolved microwave conductivity" @default.
- W2000758853 cites W1989480455 @default.
- W2000758853 cites W1998782500 @default.
- W2000758853 cites W2026070876 @default.
- W2000758853 cites W2036988919 @default.
- W2000758853 cites W2040071471 @default.
- W2000758853 cites W2047120703 @default.
- W2000758853 cites W2049632746 @default.
- W2000758853 doi "https://doi.org/10.1016/s0022-3093(98)00320-2" @default.
- W2000758853 hasPublicationYear "1998" @default.
- W2000758853 type Work @default.
- W2000758853 sameAs 2000758853 @default.
- W2000758853 citedByCount "5" @default.
- W2000758853 countsByYear W20007588532013 @default.
- W2000758853 crossrefType "journal-article" @default.
- W2000758853 hasAuthorship W2000758853A5032522110 @default.
- W2000758853 hasAuthorship W2000758853A5052833091 @default.
- W2000758853 hasAuthorship W2000758853A5066921816 @default.
- W2000758853 hasAuthorship W2000758853A5067440332 @default.
- W2000758853 hasAuthorship W2000758853A5074560940 @default.
- W2000758853 hasConcept C106782819 @default.
- W2000758853 hasConcept C113196181 @default.
- W2000758853 hasConcept C120665830 @default.
- W2000758853 hasConcept C121332964 @default.
- W2000758853 hasConcept C131540310 @default.
- W2000758853 hasConcept C147789679 @default.
- W2000758853 hasConcept C171250308 @default.
- W2000758853 hasConcept C185592680 @default.
- W2000758853 hasConcept C192562407 @default.
- W2000758853 hasConcept C201370411 @default.
- W2000758853 hasConcept C22078206 @default.
- W2000758853 hasConcept C2780841128 @default.
- W2000758853 hasConcept C43617362 @default.
- W2000758853 hasConcept C44838205 @default.
- W2000758853 hasConcept C49040817 @default.
- W2000758853 hasConcept C520434653 @default.
- W2000758853 hasConcept C544956773 @default.
- W2000758853 hasConcept C62520636 @default.
- W2000758853 hasConcept C8010536 @default.
- W2000758853 hasConceptScore W2000758853C106782819 @default.
- W2000758853 hasConceptScore W2000758853C113196181 @default.
- W2000758853 hasConceptScore W2000758853C120665830 @default.
- W2000758853 hasConceptScore W2000758853C121332964 @default.
- W2000758853 hasConceptScore W2000758853C131540310 @default.
- W2000758853 hasConceptScore W2000758853C147789679 @default.
- W2000758853 hasConceptScore W2000758853C171250308 @default.
- W2000758853 hasConceptScore W2000758853C185592680 @default.
- W2000758853 hasConceptScore W2000758853C192562407 @default.
- W2000758853 hasConceptScore W2000758853C201370411 @default.
- W2000758853 hasConceptScore W2000758853C22078206 @default.
- W2000758853 hasConceptScore W2000758853C2780841128 @default.
- W2000758853 hasConceptScore W2000758853C43617362 @default.
- W2000758853 hasConceptScore W2000758853C44838205 @default.
- W2000758853 hasConceptScore W2000758853C49040817 @default.
- W2000758853 hasConceptScore W2000758853C520434653 @default.
- W2000758853 hasConceptScore W2000758853C544956773 @default.
- W2000758853 hasConceptScore W2000758853C62520636 @default.
- W2000758853 hasConceptScore W2000758853C8010536 @default.
- W2000758853 hasLocation W20007588531 @default.
- W2000758853 hasLocation W20007588532 @default.
- W2000758853 hasOpenAccess W2000758853 @default.
- W2000758853 hasPrimaryLocation W20007588531 @default.
- W2000758853 hasRelatedWork W1965911400 @default.
- W2000758853 hasRelatedWork W1992157825 @default.
- W2000758853 hasRelatedWork W2009024500 @default.
- W2000758853 hasRelatedWork W2012191749 @default.
- W2000758853 hasRelatedWork W2059223385 @default.
- W2000758853 hasRelatedWork W2060791176 @default.
- W2000758853 hasRelatedWork W2088148334 @default.
- W2000758853 hasRelatedWork W2093507812 @default.
- W2000758853 hasRelatedWork W2140332537 @default.
- W2000758853 hasRelatedWork W2171270712 @default.
- W2000758853 hasVolume "227-230" @default.
- W2000758853 isParatext "false" @default.
- W2000758853 isRetracted "false" @default.
- W2000758853 magId "2000758853" @default.
- W2000758853 workType "article" @default.