Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000759568> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W2000759568 endingPage "2582" @default.
- W2000759568 startingPage "2578" @default.
- W2000759568 abstract "An inductively coupled Gaseous Electronics Conference (GEC) cell with modified viewing ports has been used to measure in situ absorption in CF4 plasmas via Fourier transform infrared spectroscopy, and the results compared to those obtained in a standard viewport configuration. The viewing ports were modified so that the window boundary is inside, rather than outside, of the GEC cell. Because the absorption obtained is a line of sight integrated absorption, measurements made represent an averaging of absorbing species inside and outside of the plasma. This modification is made to reduce this spatial averaging and thus allow a more accurate estimation of neutral species concentrations and temperatures within the plasmas. By reducing this path length, we find that the apparent CF4 consumption increases from 65% to 95% and the apparent vibrational temperature of CF4 rises by 50–75 K. The apparent fraction of etch product SiF4 decreases from 4% to 2%. The data suggest that these density changes may be due to significant temperature gradients between the plasma and chamber viewports." @default.
- W2000759568 created "2016-06-24" @default.
- W2000759568 creator A5004860696 @default.
- W2000759568 creator A5010735432 @default.
- W2000759568 creator A5070581515 @default.
- W2000759568 creator A5070999670 @default.
- W2000759568 date "2002-06-21" @default.
- W2000759568 modified "2023-09-25" @default.
- W2000759568 title "Optical path length control in plasma absorption measurements" @default.
- W2000759568 cites W1976942611 @default.
- W2000759568 cites W2000932723 @default.
- W2000759568 cites W2020557462 @default.
- W2000759568 cites W2026556362 @default.
- W2000759568 cites W2034680614 @default.
- W2000759568 cites W2042071870 @default.
- W2000759568 cites W2067566148 @default.
- W2000759568 cites W2095042184 @default.
- W2000759568 doi "https://doi.org/10.1063/1.1483898" @default.
- W2000759568 hasPublicationYear "2002" @default.
- W2000759568 type Work @default.
- W2000759568 sameAs 2000759568 @default.
- W2000759568 citedByCount "2" @default.
- W2000759568 crossrefType "journal-article" @default.
- W2000759568 hasAuthorship W2000759568A5004860696 @default.
- W2000759568 hasAuthorship W2000759568A5010735432 @default.
- W2000759568 hasAuthorship W2000759568A5070581515 @default.
- W2000759568 hasAuthorship W2000759568A5070999670 @default.
- W2000759568 hasConcept C113196181 @default.
- W2000759568 hasConcept C119824511 @default.
- W2000759568 hasConcept C120665830 @default.
- W2000759568 hasConcept C121332964 @default.
- W2000759568 hasConcept C125287762 @default.
- W2000759568 hasConcept C154945302 @default.
- W2000759568 hasConcept C159985019 @default.
- W2000759568 hasConcept C160892712 @default.
- W2000759568 hasConcept C168986899 @default.
- W2000759568 hasConcept C184779094 @default.
- W2000759568 hasConcept C185592680 @default.
- W2000759568 hasConcept C191486275 @default.
- W2000759568 hasConcept C192562407 @default.
- W2000759568 hasConcept C2778090530 @default.
- W2000759568 hasConcept C41008148 @default.
- W2000759568 hasConcept C43503373 @default.
- W2000759568 hasConcept C43617362 @default.
- W2000759568 hasConcept C62520636 @default.
- W2000759568 hasConcept C82706917 @default.
- W2000759568 hasConceptScore W2000759568C113196181 @default.
- W2000759568 hasConceptScore W2000759568C119824511 @default.
- W2000759568 hasConceptScore W2000759568C120665830 @default.
- W2000759568 hasConceptScore W2000759568C121332964 @default.
- W2000759568 hasConceptScore W2000759568C125287762 @default.
- W2000759568 hasConceptScore W2000759568C154945302 @default.
- W2000759568 hasConceptScore W2000759568C159985019 @default.
- W2000759568 hasConceptScore W2000759568C160892712 @default.
- W2000759568 hasConceptScore W2000759568C168986899 @default.
- W2000759568 hasConceptScore W2000759568C184779094 @default.
- W2000759568 hasConceptScore W2000759568C185592680 @default.
- W2000759568 hasConceptScore W2000759568C191486275 @default.
- W2000759568 hasConceptScore W2000759568C192562407 @default.
- W2000759568 hasConceptScore W2000759568C2778090530 @default.
- W2000759568 hasConceptScore W2000759568C41008148 @default.
- W2000759568 hasConceptScore W2000759568C43503373 @default.
- W2000759568 hasConceptScore W2000759568C43617362 @default.
- W2000759568 hasConceptScore W2000759568C62520636 @default.
- W2000759568 hasConceptScore W2000759568C82706917 @default.
- W2000759568 hasIssue "7" @default.
- W2000759568 hasLocation W20007595681 @default.
- W2000759568 hasOpenAccess W2000759568 @default.
- W2000759568 hasPrimaryLocation W20007595681 @default.
- W2000759568 hasRelatedWork W1676253050 @default.
- W2000759568 hasRelatedWork W1965426605 @default.
- W2000759568 hasRelatedWork W2000759568 @default.
- W2000759568 hasRelatedWork W2023407531 @default.
- W2000759568 hasRelatedWork W2037480211 @default.
- W2000759568 hasRelatedWork W2043032682 @default.
- W2000759568 hasRelatedWork W2114284783 @default.
- W2000759568 hasRelatedWork W2900091209 @default.
- W2000759568 hasRelatedWork W3118769770 @default.
- W2000759568 hasRelatedWork W4367186977 @default.
- W2000759568 hasVolume "73" @default.
- W2000759568 isParatext "false" @default.
- W2000759568 isRetracted "false" @default.
- W2000759568 magId "2000759568" @default.
- W2000759568 workType "article" @default.