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- W2000762570 abstract "Abstract In this study, nitrogen is introduced into a molybdenum film evaporated onto a silicon wafer. Nitrogen redistribution and alteration of silicide formation during subsequent annealing were investigated. It was found that nitrogen redistributes uniformly in the molybdenum film and becomes incorporated into the growing MoSi2 layer without any segregation effect taking place. However, nitrogen accumulates at the MoSi interfaces with high dose nitrogen implantation. Nitrogen incorporation causes an incubation time in the growth of MoSi2 which lengthens with increasing nitrogen dose. Nitrogen also slows down the silicide growth while the parabolic growth pattern is retained." @default.
- W2000762570 created "2016-06-24" @default.
- W2000762570 creator A5027115458 @default.
- W2000762570 creator A5048534403 @default.
- W2000762570 creator A5086241445 @default.
- W2000762570 date "1985-05-01" @default.
- W2000762570 modified "2023-09-27" @default.
- W2000762570 title "Effects of ion-implanted nitrogen impurities on molybdenum silicide formation" @default.
- W2000762570 cites W1510533235 @default.
- W2000762570 cites W1974074682 @default.
- W2000762570 cites W2002361265 @default.
- W2000762570 cites W2005297070 @default.
- W2000762570 cites W2009103605 @default.
- W2000762570 cites W2018579395 @default.
- W2000762570 cites W2024312844 @default.
- W2000762570 cites W2026643363 @default.
- W2000762570 cites W2037120521 @default.
- W2000762570 cites W2045615471 @default.
- W2000762570 cites W2049721411 @default.
- W2000762570 cites W2050445142 @default.
- W2000762570 cites W2052956262 @default.
- W2000762570 cites W2067019545 @default.
- W2000762570 cites W2080717600 @default.
- W2000762570 cites W2084469462 @default.
- W2000762570 cites W2088030914 @default.
- W2000762570 cites W2095398634 @default.
- W2000762570 cites W2149768403 @default.
- W2000762570 cites W2156420718 @default.
- W2000762570 cites W252341013 @default.
- W2000762570 doi "https://doi.org/10.1016/0040-6090(85)90222-6" @default.
- W2000762570 hasPublicationYear "1985" @default.
- W2000762570 type Work @default.
- W2000762570 sameAs 2000762570 @default.
- W2000762570 citedByCount "4" @default.
- W2000762570 crossrefType "journal-article" @default.
- W2000762570 hasAuthorship W2000762570A5027115458 @default.
- W2000762570 hasAuthorship W2000762570A5048534403 @default.
- W2000762570 hasAuthorship W2000762570A5086241445 @default.
- W2000762570 hasConcept C145148216 @default.
- W2000762570 hasConcept C160671074 @default.
- W2000762570 hasConcept C171250308 @default.
- W2000762570 hasConcept C178790620 @default.
- W2000762570 hasConcept C179104552 @default.
- W2000762570 hasConcept C185592680 @default.
- W2000762570 hasConcept C191897082 @default.
- W2000762570 hasConcept C192562407 @default.
- W2000762570 hasConcept C2777855556 @default.
- W2000762570 hasConcept C2780901251 @default.
- W2000762570 hasConcept C41823505 @default.
- W2000762570 hasConcept C537208039 @default.
- W2000762570 hasConcept C544956773 @default.
- W2000762570 hasConcept C549387045 @default.
- W2000762570 hasConcept C71987851 @default.
- W2000762570 hasConceptScore W2000762570C145148216 @default.
- W2000762570 hasConceptScore W2000762570C160671074 @default.
- W2000762570 hasConceptScore W2000762570C171250308 @default.
- W2000762570 hasConceptScore W2000762570C178790620 @default.
- W2000762570 hasConceptScore W2000762570C179104552 @default.
- W2000762570 hasConceptScore W2000762570C185592680 @default.
- W2000762570 hasConceptScore W2000762570C191897082 @default.
- W2000762570 hasConceptScore W2000762570C192562407 @default.
- W2000762570 hasConceptScore W2000762570C2777855556 @default.
- W2000762570 hasConceptScore W2000762570C2780901251 @default.
- W2000762570 hasConceptScore W2000762570C41823505 @default.
- W2000762570 hasConceptScore W2000762570C537208039 @default.
- W2000762570 hasConceptScore W2000762570C544956773 @default.
- W2000762570 hasConceptScore W2000762570C549387045 @default.
- W2000762570 hasConceptScore W2000762570C71987851 @default.
- W2000762570 hasLocation W20007625701 @default.
- W2000762570 hasOpenAccess W2000762570 @default.
- W2000762570 hasPrimaryLocation W20007625701 @default.
- W2000762570 hasRelatedWork W1965984294 @default.
- W2000762570 hasRelatedWork W1989137734 @default.
- W2000762570 hasRelatedWork W1991919988 @default.
- W2000762570 hasRelatedWork W1995602701 @default.
- W2000762570 hasRelatedWork W1997724652 @default.
- W2000762570 hasRelatedWork W2000405700 @default.
- W2000762570 hasRelatedWork W2002919869 @default.
- W2000762570 hasRelatedWork W2004394543 @default.
- W2000762570 hasRelatedWork W2014205052 @default.
- W2000762570 hasRelatedWork W2028509266 @default.
- W2000762570 hasRelatedWork W2029016577 @default.
- W2000762570 hasRelatedWork W2054130274 @default.
- W2000762570 hasRelatedWork W2069123215 @default.
- W2000762570 hasRelatedWork W2076165294 @default.
- W2000762570 hasRelatedWork W2084956533 @default.
- W2000762570 hasRelatedWork W2091603459 @default.
- W2000762570 hasRelatedWork W2158797840 @default.
- W2000762570 hasRelatedWork W2191407683 @default.
- W2000762570 hasRelatedWork W2961134599 @default.
- W2000762570 hasRelatedWork W84682350 @default.
- W2000762570 isParatext "false" @default.
- W2000762570 isRetracted "false" @default.
- W2000762570 magId "2000762570" @default.
- W2000762570 workType "article" @default.