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- W2000764745 endingPage "2581" @default.
- W2000764745 startingPage "2581" @default.
- W2000764745 abstract "A metallic W film was prepared from a WO 3 electron-resist film by H 2 -reduction above 600°C, and the characteristics of the reduced W film have been investigated. It was found that the electric resistivity of the film decreases and the size of the constituent grains increases with increasing reduction temperature, while the film thickness decreases down to about 40% of the initial thickness above 600°C. The reduced W film had a discontinuous structure with many cracks and had random crystal orientation of the grains. A fine pattern of metallic W with high contrast and no crack was fabricated by the H 2 -reduction of a fine pattern of the WO 3 electron resist." @default.
- W2000764745 created "2016-06-24" @default.
- W2000764745 creator A5023707102 @default.
- W2000764745 creator A5077083242 @default.
- W2000764745 creator A5086307558 @default.
- W2000764745 date "1991-10-01" @default.
- W2000764745 modified "2023-09-26" @default.
- W2000764745 title "Preparation of Metallic W Film by H<sub>2</sub>-Reduction of WO<sub>3</sub> Electron-Resist Film" @default.
- W2000764745 cites W1981839928 @default.
- W2000764745 cites W1990231281 @default.
- W2000764745 cites W2001236450 @default.
- W2000764745 cites W2043180652 @default.
- W2000764745 cites W2058477729 @default.
- W2000764745 cites W2126263815 @default.
- W2000764745 doi "https://doi.org/10.1143/jjap.30.2581" @default.
- W2000764745 hasPublicationYear "1991" @default.
- W2000764745 type Work @default.
- W2000764745 sameAs 2000764745 @default.
- W2000764745 citedByCount "8" @default.
- W2000764745 countsByYear W20007647452023 @default.
- W2000764745 crossrefType "journal-article" @default.
- W2000764745 hasAuthorship W2000764745A5023707102 @default.
- W2000764745 hasAuthorship W2000764745A5077083242 @default.
- W2000764745 hasAuthorship W2000764745A5086307558 @default.
- W2000764745 hasConcept C113196181 @default.
- W2000764745 hasConcept C119599485 @default.
- W2000764745 hasConcept C121332964 @default.
- W2000764745 hasConcept C127413603 @default.
- W2000764745 hasConcept C147120987 @default.
- W2000764745 hasConcept C159985019 @default.
- W2000764745 hasConcept C171250308 @default.
- W2000764745 hasConcept C185592680 @default.
- W2000764745 hasConcept C19067145 @default.
- W2000764745 hasConcept C191897082 @default.
- W2000764745 hasConcept C192562407 @default.
- W2000764745 hasConcept C2779227376 @default.
- W2000764745 hasConcept C43617362 @default.
- W2000764745 hasConcept C53524968 @default.
- W2000764745 hasConcept C544153396 @default.
- W2000764745 hasConcept C62520636 @default.
- W2000764745 hasConcept C69990965 @default.
- W2000764745 hasConceptScore W2000764745C113196181 @default.
- W2000764745 hasConceptScore W2000764745C119599485 @default.
- W2000764745 hasConceptScore W2000764745C121332964 @default.
- W2000764745 hasConceptScore W2000764745C127413603 @default.
- W2000764745 hasConceptScore W2000764745C147120987 @default.
- W2000764745 hasConceptScore W2000764745C159985019 @default.
- W2000764745 hasConceptScore W2000764745C171250308 @default.
- W2000764745 hasConceptScore W2000764745C185592680 @default.
- W2000764745 hasConceptScore W2000764745C19067145 @default.
- W2000764745 hasConceptScore W2000764745C191897082 @default.
- W2000764745 hasConceptScore W2000764745C192562407 @default.
- W2000764745 hasConceptScore W2000764745C2779227376 @default.
- W2000764745 hasConceptScore W2000764745C43617362 @default.
- W2000764745 hasConceptScore W2000764745C53524968 @default.
- W2000764745 hasConceptScore W2000764745C544153396 @default.
- W2000764745 hasConceptScore W2000764745C62520636 @default.
- W2000764745 hasConceptScore W2000764745C69990965 @default.
- W2000764745 hasIssue "10R" @default.
- W2000764745 hasLocation W20007647451 @default.
- W2000764745 hasOpenAccess W2000764745 @default.
- W2000764745 hasPrimaryLocation W20007647451 @default.
- W2000764745 hasRelatedWork W2051270029 @default.
- W2000764745 hasRelatedWork W2082293200 @default.
- W2000764745 hasRelatedWork W2088899554 @default.
- W2000764745 hasRelatedWork W2137307547 @default.
- W2000764745 hasRelatedWork W2380293314 @default.
- W2000764745 hasRelatedWork W2943188944 @default.
- W2000764745 hasRelatedWork W3008690834 @default.
- W2000764745 hasRelatedWork W3082440218 @default.
- W2000764745 hasRelatedWork W4242480814 @default.
- W2000764745 hasRelatedWork W4285802202 @default.
- W2000764745 hasVolume "30" @default.
- W2000764745 isParatext "false" @default.
- W2000764745 isRetracted "false" @default.
- W2000764745 magId "2000764745" @default.
- W2000764745 workType "article" @default.