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- W2000766245 endingPage "51" @default.
- W2000766245 startingPage "49" @default.
- W2000766245 abstract "Damage-enhanced diffusion and annealing is examined as a means for producing the observed redistribution of boron that is implanted into Si at 77 °K and then annealed at 650 °C. A model incorporating spatial variation of both the diffusion coefficient and the final electrical activity is found to fit the experimental data with reasonable accuracy." @default.
- W2000766245 created "2016-06-24" @default.
- W2000766245 creator A5001288448 @default.
- W2000766245 date "1973-07-01" @default.
- W2000766245 modified "2023-09-25" @default.
- W2000766245 title "Acceptor profiles obtained by diffusive redistribution of implanted impurities during annealing" @default.
- W2000766245 cites W1967576038 @default.
- W2000766245 cites W2010849017 @default.
- W2000766245 cites W2041856109 @default.
- W2000766245 cites W2065258228 @default.
- W2000766245 cites W2075528052 @default.
- W2000766245 cites W2144759212 @default.
- W2000766245 doi "https://doi.org/10.1063/1.1654734" @default.
- W2000766245 hasPublicationYear "1973" @default.
- W2000766245 type Work @default.
- W2000766245 sameAs 2000766245 @default.
- W2000766245 citedByCount "10" @default.
- W2000766245 crossrefType "journal-article" @default.
- W2000766245 hasAuthorship W2000766245A5001288448 @default.
- W2000766245 hasConcept C113196181 @default.
- W2000766245 hasConcept C121332964 @default.
- W2000766245 hasConcept C145148216 @default.
- W2000766245 hasConcept C17744445 @default.
- W2000766245 hasConcept C178790620 @default.
- W2000766245 hasConcept C185592680 @default.
- W2000766245 hasConcept C191897082 @default.
- W2000766245 hasConcept C192562407 @default.
- W2000766245 hasConcept C199539241 @default.
- W2000766245 hasConcept C207521374 @default.
- W2000766245 hasConcept C26873012 @default.
- W2000766245 hasConcept C2777855556 @default.
- W2000766245 hasConcept C2779892579 @default.
- W2000766245 hasConcept C41823505 @default.
- W2000766245 hasConcept C43617362 @default.
- W2000766245 hasConcept C501308230 @default.
- W2000766245 hasConcept C544956773 @default.
- W2000766245 hasConcept C71987851 @default.
- W2000766245 hasConcept C74080474 @default.
- W2000766245 hasConcept C94625758 @default.
- W2000766245 hasConceptScore W2000766245C113196181 @default.
- W2000766245 hasConceptScore W2000766245C121332964 @default.
- W2000766245 hasConceptScore W2000766245C145148216 @default.
- W2000766245 hasConceptScore W2000766245C17744445 @default.
- W2000766245 hasConceptScore W2000766245C178790620 @default.
- W2000766245 hasConceptScore W2000766245C185592680 @default.
- W2000766245 hasConceptScore W2000766245C191897082 @default.
- W2000766245 hasConceptScore W2000766245C192562407 @default.
- W2000766245 hasConceptScore W2000766245C199539241 @default.
- W2000766245 hasConceptScore W2000766245C207521374 @default.
- W2000766245 hasConceptScore W2000766245C26873012 @default.
- W2000766245 hasConceptScore W2000766245C2777855556 @default.
- W2000766245 hasConceptScore W2000766245C2779892579 @default.
- W2000766245 hasConceptScore W2000766245C41823505 @default.
- W2000766245 hasConceptScore W2000766245C43617362 @default.
- W2000766245 hasConceptScore W2000766245C501308230 @default.
- W2000766245 hasConceptScore W2000766245C544956773 @default.
- W2000766245 hasConceptScore W2000766245C71987851 @default.
- W2000766245 hasConceptScore W2000766245C74080474 @default.
- W2000766245 hasConceptScore W2000766245C94625758 @default.
- W2000766245 hasIssue "1" @default.
- W2000766245 hasLocation W20007662451 @default.
- W2000766245 hasOpenAccess W2000766245 @default.
- W2000766245 hasPrimaryLocation W20007662451 @default.
- W2000766245 hasRelatedWork W1977974829 @default.
- W2000766245 hasRelatedWork W1990034054 @default.
- W2000766245 hasRelatedWork W1997428111 @default.
- W2000766245 hasRelatedWork W2038218317 @default.
- W2000766245 hasRelatedWork W2048269824 @default.
- W2000766245 hasRelatedWork W2054572570 @default.
- W2000766245 hasRelatedWork W2065669148 @default.
- W2000766245 hasRelatedWork W2275386326 @default.
- W2000766245 hasRelatedWork W4226067300 @default.
- W2000766245 hasRelatedWork W793081105 @default.
- W2000766245 hasVolume "23" @default.
- W2000766245 isParatext "false" @default.
- W2000766245 isRetracted "false" @default.
- W2000766245 magId "2000766245" @default.
- W2000766245 workType "article" @default.