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- W2000767908 endingPage "215" @default.
- W2000767908 startingPage "206" @default.
- W2000767908 abstract "The interlayer van der Pauw (VDP) resistor alignment bridge combines the sheet resistor and registration-sensitive bridge into one unified structure. As a result of symmetry, it does not require the width corrections resulting from image exposure and etch variations typical of linear resistor structures. It uses minimum area and pad count and provides orthogonal registration measurements. Bridges designed for 1.5- mu m feature size with body dimensions of 18 and 21 mu m and a tap length to width ratio of 0.5 show a sensitivity of 34-38 mV/ mu m at 10 mA. Registration errors of 0.2 mu m have been measured with an error of less than 10%. A good statistical correlation has been obtained between drawn and measured registration offsets. The correlation between the VDP bridge and the optical vernier is within +or-2% using a vernier spacing of 0.125 mu m. These results clearly indicate that the VDP bridge has the potential to provide accurate measurements of photo mask registration with the precision required for very large scale integration (VLSI) processing. The application of the VDP resistor bridge for interlayer registration using standard production procedures is described. Measurement precision and accuracy are discussed along with some fundamental bridge-design considerations.< <ETX xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>></ETX>" @default.
- W2000767908 created "2016-06-24" @default.
- W2000767908 creator A5006992057 @default.
- W2000767908 creator A5013053552 @default.
- W2000767908 creator A5014548691 @default.
- W2000767908 creator A5075046902 @default.
- W2000767908 date "1990-01-01" @default.
- W2000767908 modified "2023-09-25" @default.
- W2000767908 title "Design and application of the interlayer van der Pauw resistor alignment bridge" @default.
- W2000767908 cites W1991101312 @default.
- W2000767908 cites W1999743588 @default.
- W2000767908 cites W2023676267 @default.
- W2000767908 cites W2033853853 @default.
- W2000767908 doi "https://doi.org/10.1109/66.61970" @default.
- W2000767908 hasPublicationYear "1990" @default.
- W2000767908 type Work @default.
- W2000767908 sameAs 2000767908 @default.
- W2000767908 citedByCount "1" @default.
- W2000767908 crossrefType "journal-article" @default.
- W2000767908 hasAuthorship W2000767908A5006992057 @default.
- W2000767908 hasAuthorship W2000767908A5013053552 @default.
- W2000767908 hasAuthorship W2000767908A5014548691 @default.
- W2000767908 hasAuthorship W2000767908A5075046902 @default.
- W2000767908 hasConcept C100776233 @default.
- W2000767908 hasConcept C104713690 @default.
- W2000767908 hasConcept C119599485 @default.
- W2000767908 hasConcept C120665830 @default.
- W2000767908 hasConcept C121332964 @default.
- W2000767908 hasConcept C126322002 @default.
- W2000767908 hasConcept C127413603 @default.
- W2000767908 hasConcept C134112204 @default.
- W2000767908 hasConcept C137488568 @default.
- W2000767908 hasConcept C165801399 @default.
- W2000767908 hasConcept C184720557 @default.
- W2000767908 hasConcept C21200559 @default.
- W2000767908 hasConcept C24326235 @default.
- W2000767908 hasConcept C41008148 @default.
- W2000767908 hasConcept C69710193 @default.
- W2000767908 hasConcept C69990965 @default.
- W2000767908 hasConcept C71924100 @default.
- W2000767908 hasConcept C85443114 @default.
- W2000767908 hasConceptScore W2000767908C100776233 @default.
- W2000767908 hasConceptScore W2000767908C104713690 @default.
- W2000767908 hasConceptScore W2000767908C119599485 @default.
- W2000767908 hasConceptScore W2000767908C120665830 @default.
- W2000767908 hasConceptScore W2000767908C121332964 @default.
- W2000767908 hasConceptScore W2000767908C126322002 @default.
- W2000767908 hasConceptScore W2000767908C127413603 @default.
- W2000767908 hasConceptScore W2000767908C134112204 @default.
- W2000767908 hasConceptScore W2000767908C137488568 @default.
- W2000767908 hasConceptScore W2000767908C165801399 @default.
- W2000767908 hasConceptScore W2000767908C184720557 @default.
- W2000767908 hasConceptScore W2000767908C21200559 @default.
- W2000767908 hasConceptScore W2000767908C24326235 @default.
- W2000767908 hasConceptScore W2000767908C41008148 @default.
- W2000767908 hasConceptScore W2000767908C69710193 @default.
- W2000767908 hasConceptScore W2000767908C69990965 @default.
- W2000767908 hasConceptScore W2000767908C71924100 @default.
- W2000767908 hasConceptScore W2000767908C85443114 @default.
- W2000767908 hasIssue "4" @default.
- W2000767908 hasLocation W20007679081 @default.
- W2000767908 hasOpenAccess W2000767908 @default.
- W2000767908 hasPrimaryLocation W20007679081 @default.
- W2000767908 hasRelatedWork W1844392548 @default.
- W2000767908 hasRelatedWork W2000767908 @default.
- W2000767908 hasRelatedWork W2091312904 @default.
- W2000767908 hasRelatedWork W2113531532 @default.
- W2000767908 hasRelatedWork W2366193656 @default.
- W2000767908 hasRelatedWork W2370891618 @default.
- W2000767908 hasRelatedWork W2381008555 @default.
- W2000767908 hasRelatedWork W2390361722 @default.
- W2000767908 hasRelatedWork W3003398428 @default.
- W2000767908 hasRelatedWork W3130562801 @default.
- W2000767908 hasVolume "3" @default.
- W2000767908 isParatext "false" @default.
- W2000767908 isRetracted "false" @default.
- W2000767908 magId "2000767908" @default.
- W2000767908 workType "article" @default.