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- W2000770549 abstract "Abstract An Auger microprofiler specifically designed for industrial thin film analysis is presented. Because of its high performance duoplasmatron ion gun, microprofiles can be carried out on a 10μmx10μm crater area. Very fine observations of impurity diffusion and segregation in silicides are therefore possible. Comparative studies showed that this is almost impossible with the more usual Rutherford backscattering spectrometry technique." @default.
- W2000770549 created "2016-06-24" @default.
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- W2000770549 date "1986-06-01" @default.
- W2000770549 modified "2023-09-25" @default.
- W2000770549 title "Auger microprofiling of silicides in the very-large-scale integration industry" @default.
- W2000770549 cites W2092018883 @default.
- W2000770549 doi "https://doi.org/10.1016/0040-6090(86)90173-2" @default.
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