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- W2000770765 abstract "Miniaturized opto-electronic and opto-electro-micromechanic hybrid integrated components are developed utilizing newly developed micro active semiconductor devices (e.g., laser diode, pin-point emission LED), micro optic passive devices (e.g., micro Fresnel lens, grating devices), and micro actuators. As a typical example, high-performance collimated and focused light sources, optical sensing devices, and two dimensional optical scanner are presented in detail." @default.
- W2000770765 created "2016-06-24" @default.
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- W2000770765 date "1993-01-13" @default.
- W2000770765 modified "2023-09-23" @default.
- W2000770765 title "Microhybrid integrated devices and components: microphotonic devices" @default.
- W2000770765 doi "https://doi.org/10.1117/12.138899" @default.
- W2000770765 hasPublicationYear "1993" @default.
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