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• W2000772661 abstract "We have deposited YBa2Cu3O7−δ(YBCO) films with low microwave surface resistance (Rs) on 5-cm-diam, oxide-buffered sapphire substrates by planar magnetron sputtering. MgO buffer layers are used on M-plane (101̄0) sapphire, and R-plane (11̄02) sapphire is buffered by CeO2. Rs values of 450–620 μΩ at 77 K and 10 GHz were measured across an entire 5-cm diam YBCO film on M-plane sapphire. For YBCO on R-plane sapphire, Rs values at 77 K and 10 GHz were 950 μΩ for a 5-cm-diam wafer and 700 μΩ for 1×1 cm2 samples." @default.
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• W2000772661 date "1992-10-05" @default.
• W2000772661 modified "2023-09-26" @default.
• W2000772661 title "Large‐area YBa₂Cu₃O_7−δthin films on sapphire for microwave applications" @default.
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• W2000772661 doi "https://doi.org/10.1063/1.108411" @default.
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