Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000794239> ?p ?o ?g. }
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- W2000794239 endingPage "1083" @default.
- W2000794239 startingPage "1081" @default.
- W2000794239 abstract "The dependence of the implantation-induced morphology on substrate heating during high dose O+ irradiation of Si was investigated. For high dose oxygen implantation, a continuous buried oxide layer forms during implantation. It is shown that the damage morphology in the crystalline region ahead of the buried oxide is extremely sensitive to variations in the temperature of the substrate about 475 °C. Both backscattering/channeling spectroscopy and transmission electron microscopy were used in determining the microstructure of the implanted samples." @default.
- W2000794239 created "2016-06-24" @default.
- W2000794239 creator A5010567856 @default.
- W2000794239 creator A5027283646 @default.
- W2000794239 creator A5073105839 @default.
- W2000794239 creator A5074409911 @default.
- W2000794239 date "1984-11-15" @default.
- W2000794239 modified "2023-09-26" @default.
- W2000794239 title "Influence of substrate temperature on the formation of buried oxide and surface crystallinity during high dose oxygen implantation into Si" @default.
- W2000794239 cites W1971714099 @default.
- W2000794239 cites W1982843384 @default.
- W2000794239 cites W1992460126 @default.
- W2000794239 cites W2026621880 @default.
- W2000794239 cites W2063994231 @default.
- W2000794239 cites W2078464785 @default.
- W2000794239 cites W2080856527 @default.
- W2000794239 doi "https://doi.org/10.1063/1.95022" @default.
- W2000794239 hasPublicationYear "1984" @default.
- W2000794239 type Work @default.
- W2000794239 sameAs 2000794239 @default.
- W2000794239 citedByCount "54" @default.
- W2000794239 crossrefType "journal-article" @default.
- W2000794239 hasAuthorship W2000794239A5010567856 @default.
- W2000794239 hasAuthorship W2000794239A5027283646 @default.
- W2000794239 hasAuthorship W2000794239A5073105839 @default.
- W2000794239 hasAuthorship W2000794239A5074409911 @default.
- W2000794239 hasConcept C111337013 @default.
- W2000794239 hasConcept C111368507 @default.
- W2000794239 hasConcept C113196181 @default.
- W2000794239 hasConcept C121332964 @default.
- W2000794239 hasConcept C127313418 @default.
- W2000794239 hasConcept C127413603 @default.
- W2000794239 hasConcept C146088050 @default.
- W2000794239 hasConcept C159985019 @default.
- W2000794239 hasConcept C171250308 @default.
- W2000794239 hasConcept C178790620 @default.
- W2000794239 hasConcept C185544564 @default.
- W2000794239 hasConcept C185592680 @default.
- W2000794239 hasConcept C191897082 @default.
- W2000794239 hasConcept C192562407 @default.
- W2000794239 hasConcept C2777289219 @default.
- W2000794239 hasConcept C2779227376 @default.
- W2000794239 hasConcept C2779851234 @default.
- W2000794239 hasConcept C42360764 @default.
- W2000794239 hasConcept C43617362 @default.
- W2000794239 hasConcept C46275449 @default.
- W2000794239 hasConcept C540031477 @default.
- W2000794239 hasConcept C87976508 @default.
- W2000794239 hasConceptScore W2000794239C111337013 @default.
- W2000794239 hasConceptScore W2000794239C111368507 @default.
- W2000794239 hasConceptScore W2000794239C113196181 @default.
- W2000794239 hasConceptScore W2000794239C121332964 @default.
- W2000794239 hasConceptScore W2000794239C127313418 @default.
- W2000794239 hasConceptScore W2000794239C127413603 @default.
- W2000794239 hasConceptScore W2000794239C146088050 @default.
- W2000794239 hasConceptScore W2000794239C159985019 @default.
- W2000794239 hasConceptScore W2000794239C171250308 @default.
- W2000794239 hasConceptScore W2000794239C178790620 @default.
- W2000794239 hasConceptScore W2000794239C185544564 @default.
- W2000794239 hasConceptScore W2000794239C185592680 @default.
- W2000794239 hasConceptScore W2000794239C191897082 @default.
- W2000794239 hasConceptScore W2000794239C192562407 @default.
- W2000794239 hasConceptScore W2000794239C2777289219 @default.
- W2000794239 hasConceptScore W2000794239C2779227376 @default.
- W2000794239 hasConceptScore W2000794239C2779851234 @default.
- W2000794239 hasConceptScore W2000794239C42360764 @default.
- W2000794239 hasConceptScore W2000794239C43617362 @default.
- W2000794239 hasConceptScore W2000794239C46275449 @default.
- W2000794239 hasConceptScore W2000794239C540031477 @default.
- W2000794239 hasConceptScore W2000794239C87976508 @default.
- W2000794239 hasIssue "10" @default.
- W2000794239 hasLocation W20007942391 @default.
- W2000794239 hasOpenAccess W2000794239 @default.
- W2000794239 hasPrimaryLocation W20007942391 @default.
- W2000794239 hasRelatedWork W1993938466 @default.
- W2000794239 hasRelatedWork W1994202368 @default.
- W2000794239 hasRelatedWork W2016224616 @default.
- W2000794239 hasRelatedWork W2058035170 @default.
- W2000794239 hasRelatedWork W2068216902 @default.
- W2000794239 hasRelatedWork W2086692853 @default.
- W2000794239 hasRelatedWork W2216745289 @default.
- W2000794239 hasRelatedWork W2386030843 @default.
- W2000794239 hasRelatedWork W3002493417 @default.
- W2000794239 hasRelatedWork W2505527190 @default.
- W2000794239 hasVolume "45" @default.
- W2000794239 isParatext "false" @default.
- W2000794239 isRetracted "false" @default.
- W2000794239 magId "2000794239" @default.
- W2000794239 workType "article" @default.