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- W2000803013 abstract "This paper presents a quantitative comparison between off-axis digital holographic microscopy (DHM) and on-axis phase-shifting interferometry (PSI) for surface micro topography measurement. The comparison has been applied on an object of a 1.34 μm nominal step height. The experimental results show that single shot, dual-wavelength, off-axis DHM surpasses on dual-wavelength, on-axis PSI in terms of accuracy and repeatability." @default.
- W2000803013 created "2016-06-24" @default.
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- W2000803013 date "2013-12-01" @default.
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- W2000803013 title "A comparison of digital holographic microscopy and on-axis phase-shifting interferometry for surface profiling" @default.
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- W2000803013 doi "https://doi.org/10.1016/j.measurement.2013.07.026" @default.
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