Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000804585> ?p ?o ?g. }
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with 100 items per page.
- W2000804585 endingPage "442" @default.
- W2000804585 startingPage "438" @default.
- W2000804585 abstract "Microelectromechanical systems and microfluidic devices feature buried channels, cavities, and other embedded microstructures. These features are usually examined by breaking the wafer and by imaging the revealed cross section. We propose a nondestructive technique to evaluate the shape and surface quality of buried microchannels with submicrometer resolution. The technique relies on infrared light interferometry. We employed the technique to nondestructively examine channels and cavities through a silicon roof. With the proposed technique, we can quantitatively examine the size and shape of microchannels that are hidden to visible light." @default.
- W2000804585 created "2016-06-24" @default.
- W2000804585 creator A5003078706 @default.
- W2000804585 creator A5006834180 @default.
- W2000804585 creator A5011966922 @default.
- W2000804585 creator A5016066381 @default.
- W2000804585 creator A5070446016 @default.
- W2000804585 creator A5071228121 @default.
- W2000804585 creator A5081748836 @default.
- W2000804585 date "2013-04-01" @default.
- W2000804585 modified "2023-09-25" @default.
- W2000804585 title "Nondestructive Inspection of Buried Channels and Cavities in Silicon" @default.
- W2000804585 cites W1967142091 @default.
- W2000804585 cites W1982610511 @default.
- W2000804585 cites W1987723324 @default.
- W2000804585 cites W1988333076 @default.
- W2000804585 cites W2004231821 @default.
- W2000804585 cites W2026549252 @default.
- W2000804585 cites W2029803801 @default.
- W2000804585 cites W2036032799 @default.
- W2000804585 cites W2037475736 @default.
- W2000804585 cites W2062563238 @default.
- W2000804585 cites W2071598334 @default.
- W2000804585 cites W2080406730 @default.
- W2000804585 cites W2094094681 @default.
- W2000804585 cites W2111848704 @default.
- W2000804585 cites W2128556350 @default.
- W2000804585 cites W2131407182 @default.
- W2000804585 cites W2132362639 @default.
- W2000804585 cites W2138421757 @default.
- W2000804585 cites W2146795298 @default.
- W2000804585 cites W2150443767 @default.
- W2000804585 doi "https://doi.org/10.1109/jmems.2012.2227460" @default.
- W2000804585 hasPublicationYear "2013" @default.
- W2000804585 type Work @default.
- W2000804585 sameAs 2000804585 @default.
- W2000804585 citedByCount "8" @default.
- W2000804585 countsByYear W20008045852015 @default.
- W2000804585 countsByYear W20008045852018 @default.
- W2000804585 countsByYear W20008045852019 @default.
- W2000804585 countsByYear W20008045852022 @default.
- W2000804585 crossrefType "journal-article" @default.
- W2000804585 hasAuthorship W2000804585A5003078706 @default.
- W2000804585 hasAuthorship W2000804585A5006834180 @default.
- W2000804585 hasAuthorship W2000804585A5011966922 @default.
- W2000804585 hasAuthorship W2000804585A5016066381 @default.
- W2000804585 hasAuthorship W2000804585A5070446016 @default.
- W2000804585 hasAuthorship W2000804585A5071228121 @default.
- W2000804585 hasAuthorship W2000804585A5081748836 @default.
- W2000804585 hasConcept C120665830 @default.
- W2000804585 hasConcept C121332964 @default.
- W2000804585 hasConcept C138885662 @default.
- W2000804585 hasConcept C160671074 @default.
- W2000804585 hasConcept C166689943 @default.
- W2000804585 hasConcept C171250308 @default.
- W2000804585 hasConcept C192562407 @default.
- W2000804585 hasConcept C2776401178 @default.
- W2000804585 hasConcept C37977207 @default.
- W2000804585 hasConcept C41895202 @default.
- W2000804585 hasConcept C49040817 @default.
- W2000804585 hasConcept C544956773 @default.
- W2000804585 hasConcept C56529433 @default.
- W2000804585 hasConcept C62520636 @default.
- W2000804585 hasConcept C8673954 @default.
- W2000804585 hasConceptScore W2000804585C120665830 @default.
- W2000804585 hasConceptScore W2000804585C121332964 @default.
- W2000804585 hasConceptScore W2000804585C138885662 @default.
- W2000804585 hasConceptScore W2000804585C160671074 @default.
- W2000804585 hasConceptScore W2000804585C166689943 @default.
- W2000804585 hasConceptScore W2000804585C171250308 @default.
- W2000804585 hasConceptScore W2000804585C192562407 @default.
- W2000804585 hasConceptScore W2000804585C2776401178 @default.
- W2000804585 hasConceptScore W2000804585C37977207 @default.
- W2000804585 hasConceptScore W2000804585C41895202 @default.
- W2000804585 hasConceptScore W2000804585C49040817 @default.
- W2000804585 hasConceptScore W2000804585C544956773 @default.
- W2000804585 hasConceptScore W2000804585C56529433 @default.
- W2000804585 hasConceptScore W2000804585C62520636 @default.
- W2000804585 hasConceptScore W2000804585C8673954 @default.
- W2000804585 hasIssue "2" @default.
- W2000804585 hasLocation W20008045851 @default.
- W2000804585 hasOpenAccess W2000804585 @default.
- W2000804585 hasPrimaryLocation W20008045851 @default.
- W2000804585 hasRelatedWork W1989837109 @default.
- W2000804585 hasRelatedWork W1990165374 @default.
- W2000804585 hasRelatedWork W2017697939 @default.
- W2000804585 hasRelatedWork W2030000362 @default.
- W2000804585 hasRelatedWork W2044075211 @default.
- W2000804585 hasRelatedWork W2046527338 @default.
- W2000804585 hasRelatedWork W2100299767 @default.
- W2000804585 hasRelatedWork W2260530752 @default.
- W2000804585 hasRelatedWork W2766317712 @default.
- W2000804585 hasRelatedWork W4234697633 @default.
- W2000804585 hasVolume "22" @default.
- W2000804585 isParatext "false" @default.
- W2000804585 isRetracted "false" @default.
- W2000804585 magId "2000804585" @default.
- W2000804585 workType "article" @default.