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- W2000810897 abstract "We have developed a computer-controlled coherence probe microscope which can rapidly and accurately map the shape of micro-machined surfaces exhibiting steps and discontinuities. The instrument uses white-light and scans the object in height. The novel feature of the instrument is the use of an achromatic phase-shifter operating on the principle of geometric phase to evaluate the fringe visibility directly for each point on the object. This allows location of the position of the visibility peak along the scanning axis, yielding the height of the surface at the corresponding points." @default.
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- W2000810897 date "1999-07-19" @default.
- W2000810897 modified "2023-09-23" @default.
- W2000810897 title "<title>Geometric phase coherence probe microscope for surface profiling</title>" @default.
- W2000810897 doi "https://doi.org/10.1117/12.354836" @default.
- W2000810897 hasPublicationYear "1999" @default.
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