FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000814951> ?p ?o ?g. }

• W2000814951 endingPage "22" @default.
• W2000814951 startingPage "17" @default.
• W2000814951 abstract "In this work, nickel induced lateral crystallization (NILC) of amorphous silicon at various temperatures has been investigated in detail. The crystallized film was characterized by micro Raman spectroscopy, atomic force microscopy (AFM), and transmission electron microscopy (TEM). Large leaf-like grains with a length on the order of 10–20 μm and a width on the order of 1–5 μm have been observed by NILC and subsequent heat treatment at 1000 °C. AFM measurements show that the crystallized film was combined by ‘smooth’ and ‘rough’ regions. Further TEM research reveals that the ‘smooth’ region has larger size and fewer defects, which may be a single grain with preferential 〈110〉 orientation. For the ‘rough’ region, many defects, dislocations and mismatches are found in it. It seems to be mixed by randomly oriented smaller grains. Further high temperature annealing can reduce the defects at the grain boundary and enlarge the grains. It was found that the NILC rate depends strongly on the annealing temperature. A maximum rate occurs at approximately 625 °C, the influences of other factors such as Ni pattern, amount of Ni, annealing time, etc., on the NILC rate are also investigated." @default.
• W2000814951 created "2016-06-24" @default.
• W2000814951 creator A5003172099 @default.
• W2000814951 creator A5031105917 @default.
• W2000814951 creator A5034579880 @default.
• W2000814951 creator A5049537095 @default.
• W2000814951 creator A5054995764 @default.
• W2000814951 creator A5065765828 @default.
• W2000814951 date "2002-03-01" @default.
• W2000814951 modified "2023-10-14" @default.
• W2000814951 title "Study of grain growth of polysilicon formed by nickel-induced-lateral-crystallization of amorphous silicon and subsequent high temperature annealing" @default.
• W2000814951 cites W1965215593 @default.
• W2000814951 cites W1995174375 @default.
• W2000814951 cites W1997340424 @default.
• W2000814951 cites W2007981627 @default.
• W2000814951 cites W2021122986 @default.
• W2000814951 cites W2028714094 @default.
• W2000814951 cites W2034213480 @default.
• W2000814951 cites W2042311929 @default.
• W2000814951 cites W2042312869 @default.
• W2000814951 cites W2065299813 @default.
• W2000814951 cites W2102764670 @default.
• W2000814951 cites W2117747791 @default.
• W2000814951 doi "https://doi.org/10.1016/s0040-6090(01)01722-9" @default.
• W2000814951 hasPublicationYear "2002" @default.
• W2000814951 type Work @default.
• W2000814951 sameAs 2000814951 @default.
• W2000814951 citedByCount "6" @default.
• W2000814951 countsByYear W20008149512013 @default.
• W2000814951 countsByYear W20008149512016 @default.
• W2000814951 countsByYear W20008149512021 @default.
• W2000814951 countsByYear W20008149512022 @default.
• W2000814951 crossrefType "journal-article" @default.
• W2000814951 hasAuthorship W2000814951A5003172099 @default.
• W2000814951 hasAuthorship W2000814951A5031105917 @default.
• W2000814951 hasAuthorship W2000814951A5034579880 @default.
• W2000814951 hasAuthorship W2000814951A5049537095 @default.
• W2000814951 hasAuthorship W2000814951A5054995764 @default.
• W2000814951 hasAuthorship W2000814951A5065765828 @default.
• W2000814951 hasConcept C102951782 @default.
• W2000814951 hasConcept C113196181 @default.
• W2000814951 hasConcept C120665830 @default.
• W2000814951 hasConcept C121332964 @default.
• W2000814951 hasConcept C127413603 @default.
• W2000814951 hasConcept C146088050 @default.
• W2000814951 hasConcept C159985019 @default.
• W2000814951 hasConcept C171250308 @default.
• W2000814951 hasConcept C185592680 @default.
• W2000814951 hasConcept C191897082 @default.
• W2000814951 hasConcept C192191005 @default.
• W2000814951 hasConcept C192562407 @default.
• W2000814951 hasConcept C203036418 @default.
• W2000814951 hasConcept C2776390347 @default.
• W2000814951 hasConcept C2777855556 @default.
• W2000814951 hasConcept C2779667780 @default.
• W2000814951 hasConcept C40003534 @default.
• W2000814951 hasConcept C42360764 @default.
• W2000814951 hasConcept C43617362 @default.
• W2000814951 hasConcept C47908070 @default.
• W2000814951 hasConcept C504270822 @default.
• W2000814951 hasConcept C544956773 @default.
• W2000814951 hasConcept C56052488 @default.
• W2000814951 hasConcept C8010536 @default.
• W2000814951 hasConcept C87976508 @default.
• W2000814951 hasConcept C98390173 @default.
• W2000814951 hasConceptScore W2000814951C102951782 @default.
• W2000814951 hasConceptScore W2000814951C113196181 @default.
• W2000814951 hasConceptScore W2000814951C120665830 @default.
• W2000814951 hasConceptScore W2000814951C121332964 @default.
• W2000814951 hasConceptScore W2000814951C127413603 @default.
• W2000814951 hasConceptScore W2000814951C146088050 @default.
• W2000814951 hasConceptScore W2000814951C159985019 @default.
• W2000814951 hasConceptScore W2000814951C171250308 @default.
• W2000814951 hasConceptScore W2000814951C185592680 @default.
• W2000814951 hasConceptScore W2000814951C191897082 @default.
• W2000814951 hasConceptScore W2000814951C192191005 @default.
• W2000814951 hasConceptScore W2000814951C192562407 @default.
• W2000814951 hasConceptScore W2000814951C203036418 @default.
• W2000814951 hasConceptScore W2000814951C2776390347 @default.
• W2000814951 hasConceptScore W2000814951C2777855556 @default.
• W2000814951 hasConceptScore W2000814951C2779667780 @default.
• W2000814951 hasConceptScore W2000814951C40003534 @default.
• W2000814951 hasConceptScore W2000814951C42360764 @default.
• W2000814951 hasConceptScore W2000814951C43617362 @default.
• W2000814951 hasConceptScore W2000814951C47908070 @default.
• W2000814951 hasConceptScore W2000814951C504270822 @default.
• W2000814951 hasConceptScore W2000814951C544956773 @default.
• W2000814951 hasConceptScore W2000814951C56052488 @default.
• W2000814951 hasConceptScore W2000814951C8010536 @default.
• W2000814951 hasConceptScore W2000814951C87976508 @default.
• W2000814951 hasConceptScore W2000814951C98390173 @default.
• W2000814951 hasIssue "1-2" @default.
• W2000814951 hasLocation W20008149511 @default.
• W2000814951 hasOpenAccess W2000814951 @default.
• W2000814951 hasPrimaryLocation W20008149511 @default.
• W2000814951 hasRelatedWork W1510657488 @default.
• W2000814951 hasRelatedWork W1561695023 @default.
• W2000814951 hasRelatedWork W1971957218 @default.

• next