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- W2000816985 abstract "A new optomechanical pressure sensor using multimode interference (MMI) couplers and a thin p + -Si membrane is presented. We simulate the device characteristics by the normal mode theory considering deflection and strain of the membrane. The optical waveguide is made of a single-mode, strip-loaded SiO 2 -SiN x -SiO 2 system. Device size can be reduced to 0.5×13 mm 2 by using a MMI coupler, and the total thickness of the membrane is 5.9 µm. The measured sensitivity is 11.98 ppm/Pa in a range of 50 kPa, which is larger than that of conventional capacitive sensors." @default.
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- W2000816985 date "1999-04-01" @default.
- W2000816985 modified "2023-09-24" @default.
- W2000816985 title "An Optomechanical Pressure Sensor Using Multimode Interference Couplers" @default.
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- W2000816985 doi "https://doi.org/10.1143/jjap.38.2664" @default.
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