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- W2000830502 abstract "Birefringence can be represented using the matrix generated by multiplying together Jones matrices for the separate lenselements. Conventional vector imaging methods, which use orthogonal electric field components in resist combined to yield the intensity, can be extended to handle this matrix representation of the optical pupil. The mean amplitude ratio of the off-diagonal elements in the matrix pupil is shown to correspond quite well to the birefringence-induced CD error." @default.
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- W2000830502 date "2004-05-28" @default.
- W2000830502 modified "2023-09-23" @default.
- W2000830502 title "Assessing the impact of intrinsic birefringence on 157-nm lithography" @default.
- W2000830502 doi "https://doi.org/10.1117/12.544242" @default.
- W2000830502 hasPublicationYear "2004" @default.
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