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- W2000842439 abstract "Silicon on Insulator (SOI) Technologies offer many advantages for the fabrication and advanced packaging of MEMS and IC devices and systems. The buried oxide provides an excellent etch stop and the silicon layers on top can be selected for the exact thickness, crystal orientation, and purity for the required application. These properties are exploited for the fabrication and packaging of MEMS devices as well as for 3D integration of SOI CMOS and flexible electronics. Particular examples from work done at MIT Lincoln Laboratory over the last 10 years will be included." @default.
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- W2000842439 date "2012-10-01" @default.
- W2000842439 modified "2023-10-12" @default.
- W2000842439 title "SOI for MEMS and advanced packaging" @default.
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- W2000842439 doi "https://doi.org/10.1109/soi.2012.6404402" @default.
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