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- W2000848072 abstract "A novel tip configuration for atomic force microscopy (AFM) called tip-on-tip is presented. In this concept a sharp, very small tip is created on top of a large truncated pyramid. The process scheme for the fabrication of tip-on-tip is presented. It is demonstrated that very sharp metal tips can be produced in this way. Advantages of tip-on-tip when applied in semiconductor device analysis are discussed. First results concerning the transfer of the developed technology to diamond are presented." @default.
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- W2000848072 date "1999-05-01" @default.
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- W2000848072 title "Tip-on-tip: a novel AFM tip configuration for the electrical characterization of semiconductor devices" @default.
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- W2000848072 doi "https://doi.org/10.1016/s0167-9317(99)00028-3" @default.
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