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- W2000863785 abstract "This paper reports a new type of soft PDMS/metal-film photo-mask which can be applied in contact photolithography with a resolution at sub-micrometer scale and a patterning area over a 4 wafer. This new type of photo-mask is made from a soft PDMS mold which contains a patterned metal film on the concave surface of its microstructures. The metal film can selectively block incident UV light, while the convex PDMS microstructures can guide the incident UV light to expose a PR layer. Due to its soft and compliant property, this new soft photo-mask can from intimate contact with a substrate and carry out UV exposure to form PR microstructures. It is particularly useful in patterning slightly curved substrates such as sapphire wafers, and therefore has a great potential on manufacturing patterned sapphire substrates (PSSs) in light-emitting diodes (LEDs). In this wok, both 2 and 4 PSSs with sub-micrometer feature sizes are successfully achieved. This new type of soft photo-mask and its contact photolithography can be easily implemented at a low cost for large-area, non-flat, and sub-micrometer scaled patterning, and therefore has a great potential in many applications in the future." @default.
- W2000863785 created "2016-06-24" @default.
- W2000863785 creator A5081086261 @default.
- W2000863785 creator A5082600040 @default.
- W2000863785 date "2013-06-01" @default.
- W2000863785 modified "2023-09-27" @default.
- W2000863785 title "A PDMS/metal-film photo-mask for large-area contact photolithograpy at sub-micrometr scale" @default.
- W2000863785 cites W1970081558 @default.
- W2000863785 cites W1971882273 @default.
- W2000863785 cites W1973381121 @default.
- W2000863785 cites W2009157771 @default.
- W2000863785 cites W2020045825 @default.
- W2000863785 cites W2035416147 @default.
- W2000863785 cites W2053913428 @default.
- W2000863785 cites W2063970416 @default.
- W2000863785 doi "https://doi.org/10.1109/transducers.2013.6627181" @default.
- W2000863785 hasPublicationYear "2013" @default.
- W2000863785 type Work @default.
- W2000863785 sameAs 2000863785 @default.
- W2000863785 citedByCount "0" @default.
- W2000863785 crossrefType "proceedings-article" @default.
- W2000863785 hasAuthorship W2000863785A5081086261 @default.
- W2000863785 hasAuthorship W2000863785A5082600040 @default.
- W2000863785 hasConcept C105487726 @default.
- W2000863785 hasConcept C111368507 @default.
- W2000863785 hasConcept C118524077 @default.
- W2000863785 hasConcept C120665830 @default.
- W2000863785 hasConcept C121332964 @default.
- W2000863785 hasConcept C127313418 @default.
- W2000863785 hasConcept C136525101 @default.
- W2000863785 hasConcept C142724271 @default.
- W2000863785 hasConcept C160671074 @default.
- W2000863785 hasConcept C171250308 @default.
- W2000863785 hasConcept C171635847 @default.
- W2000863785 hasConcept C176666156 @default.
- W2000863785 hasConcept C192562407 @default.
- W2000863785 hasConcept C204223013 @default.
- W2000863785 hasConcept C204787440 @default.
- W2000863785 hasConcept C2777289219 @default.
- W2000863785 hasConcept C2780064504 @default.
- W2000863785 hasConcept C49040817 @default.
- W2000863785 hasConcept C520434653 @default.
- W2000863785 hasConcept C71924100 @default.
- W2000863785 hasConceptScore W2000863785C105487726 @default.
- W2000863785 hasConceptScore W2000863785C111368507 @default.
- W2000863785 hasConceptScore W2000863785C118524077 @default.
- W2000863785 hasConceptScore W2000863785C120665830 @default.
- W2000863785 hasConceptScore W2000863785C121332964 @default.
- W2000863785 hasConceptScore W2000863785C127313418 @default.
- W2000863785 hasConceptScore W2000863785C136525101 @default.
- W2000863785 hasConceptScore W2000863785C142724271 @default.
- W2000863785 hasConceptScore W2000863785C160671074 @default.
- W2000863785 hasConceptScore W2000863785C171250308 @default.
- W2000863785 hasConceptScore W2000863785C171635847 @default.
- W2000863785 hasConceptScore W2000863785C176666156 @default.
- W2000863785 hasConceptScore W2000863785C192562407 @default.
- W2000863785 hasConceptScore W2000863785C204223013 @default.
- W2000863785 hasConceptScore W2000863785C204787440 @default.
- W2000863785 hasConceptScore W2000863785C2777289219 @default.
- W2000863785 hasConceptScore W2000863785C2780064504 @default.
- W2000863785 hasConceptScore W2000863785C49040817 @default.
- W2000863785 hasConceptScore W2000863785C520434653 @default.
- W2000863785 hasConceptScore W2000863785C71924100 @default.
- W2000863785 hasLocation W20008637851 @default.
- W2000863785 hasOpenAccess W2000863785 @default.
- W2000863785 hasPrimaryLocation W20008637851 @default.
- W2000863785 hasRelatedWork W2006966594 @default.
- W2000863785 hasRelatedWork W2021077848 @default.
- W2000863785 hasRelatedWork W2031178845 @default.
- W2000863785 hasRelatedWork W2055001723 @default.
- W2000863785 hasRelatedWork W2089677409 @default.
- W2000863785 hasRelatedWork W2139463373 @default.
- W2000863785 hasRelatedWork W2398511631 @default.
- W2000863785 hasRelatedWork W2937439299 @default.
- W2000863785 hasRelatedWork W3200260983 @default.
- W2000863785 hasRelatedWork W2154890483 @default.
- W2000863785 isParatext "false" @default.
- W2000863785 isRetracted "false" @default.
- W2000863785 magId "2000863785" @default.
- W2000863785 workType "article" @default.