Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000871889> ?p ?o ?g. }
Showing items 1 to 97 of
97
with 100 items per page.
- W2000871889 endingPage "26" @default.
- W2000871889 startingPage "19" @default.
- W2000871889 abstract "Recently, interest has risen in silicidation through oxide (SiTOx). For CoSi2, it has been reported that the presence of a thin, chemically grown oxide results in the formation of epitaxial CoSi2. The method is known as oxide mediated epitaxy (OME). In this paper, results are reported on CoSi2 formation in the Co/SiO2/Si, Ti/Co/SiO2/Si and Co/Ti/SiO2/Si systems for both chemically and thermally grown oxides. Chemically grown oxides were formed in HCl, NH4OH and HNO3-based solutions. The influence of the type and thickness of the oxide on the silicidation reaction is discussed. In the presence of a thin HCl oxide, the reaction proceeds in a layerwise fashion. For thicker oxides (both HNO3 and thermal oxide), the reaction is initiated at weak spots in the oxide layer. We have observed that Ti can reduce the interfacial oxide, especially if the Ti is deposited directly on top of the oxide (Co/Ti/SiO2/Si structure). This is the case both for chemically and thermally grown oxides, although the thicker the oxide, the thicker Ti layers are needed. In the presence of a Ti capping layer (Ti/Co/SiO2/Si), Ti diffuses through the unreacted Co towards the SiO2. In case of a thin oxide, the supply of Ti that can reach the oxide by fast grain boundary diffusion is sufficient for reduction of the SiO2. In case of a thicker, thermal oxide, Co3Ti is formed." @default.
- W2000871889 created "2016-06-24" @default.
- W2000871889 creator A5014028867 @default.
- W2000871889 creator A5039168166 @default.
- W2000871889 creator A5050373223 @default.
- W2000871889 creator A5067040566 @default.
- W2000871889 date "2001-05-01" @default.
- W2000871889 modified "2023-10-02" @default.
- W2000871889 title "CoSi2 formation through SiO2" @default.
- W2000871889 cites W1628260179 @default.
- W2000871889 cites W1629353781 @default.
- W2000871889 cites W1977419538 @default.
- W2000871889 cites W1977473641 @default.
- W2000871889 cites W1999897723 @default.
- W2000871889 cites W2004911401 @default.
- W2000871889 cites W2026519067 @default.
- W2000871889 cites W2037218982 @default.
- W2000871889 cites W2046205338 @default.
- W2000871889 cites W2053796418 @default.
- W2000871889 cites W2065281413 @default.
- W2000871889 cites W2068179597 @default.
- W2000871889 cites W2069201326 @default.
- W2000871889 cites W2073220865 @default.
- W2000871889 cites W2080337752 @default.
- W2000871889 cites W2087323242 @default.
- W2000871889 doi "https://doi.org/10.1016/s0040-6090(00)01899-x" @default.
- W2000871889 hasPublicationYear "2001" @default.
- W2000871889 type Work @default.
- W2000871889 sameAs 2000871889 @default.
- W2000871889 citedByCount "24" @default.
- W2000871889 countsByYear W20008718892014 @default.
- W2000871889 countsByYear W20008718892015 @default.
- W2000871889 countsByYear W20008718892016 @default.
- W2000871889 countsByYear W20008718892019 @default.
- W2000871889 countsByYear W20008718892020 @default.
- W2000871889 crossrefType "journal-article" @default.
- W2000871889 hasAuthorship W2000871889A5014028867 @default.
- W2000871889 hasAuthorship W2000871889A5039168166 @default.
- W2000871889 hasAuthorship W2000871889A5050373223 @default.
- W2000871889 hasAuthorship W2000871889A5067040566 @default.
- W2000871889 hasConcept C110738630 @default.
- W2000871889 hasConcept C121332964 @default.
- W2000871889 hasConcept C127413603 @default.
- W2000871889 hasConcept C165801399 @default.
- W2000871889 hasConcept C171250308 @default.
- W2000871889 hasConcept C172385210 @default.
- W2000871889 hasConcept C179104552 @default.
- W2000871889 hasConcept C185592680 @default.
- W2000871889 hasConcept C19067145 @default.
- W2000871889 hasConcept C191897082 @default.
- W2000871889 hasConcept C192562407 @default.
- W2000871889 hasConcept C199289684 @default.
- W2000871889 hasConcept C2361726 @default.
- W2000871889 hasConcept C2779227376 @default.
- W2000871889 hasConcept C2779851234 @default.
- W2000871889 hasConcept C42360764 @default.
- W2000871889 hasConcept C52780932 @default.
- W2000871889 hasConcept C62520636 @default.
- W2000871889 hasConceptScore W2000871889C110738630 @default.
- W2000871889 hasConceptScore W2000871889C121332964 @default.
- W2000871889 hasConceptScore W2000871889C127413603 @default.
- W2000871889 hasConceptScore W2000871889C165801399 @default.
- W2000871889 hasConceptScore W2000871889C171250308 @default.
- W2000871889 hasConceptScore W2000871889C172385210 @default.
- W2000871889 hasConceptScore W2000871889C179104552 @default.
- W2000871889 hasConceptScore W2000871889C185592680 @default.
- W2000871889 hasConceptScore W2000871889C19067145 @default.
- W2000871889 hasConceptScore W2000871889C191897082 @default.
- W2000871889 hasConceptScore W2000871889C192562407 @default.
- W2000871889 hasConceptScore W2000871889C199289684 @default.
- W2000871889 hasConceptScore W2000871889C2361726 @default.
- W2000871889 hasConceptScore W2000871889C2779227376 @default.
- W2000871889 hasConceptScore W2000871889C2779851234 @default.
- W2000871889 hasConceptScore W2000871889C42360764 @default.
- W2000871889 hasConceptScore W2000871889C52780932 @default.
- W2000871889 hasConceptScore W2000871889C62520636 @default.
- W2000871889 hasIssue "1" @default.
- W2000871889 hasLocation W20008718891 @default.
- W2000871889 hasOpenAccess W2000871889 @default.
- W2000871889 hasPrimaryLocation W20008718891 @default.
- W2000871889 hasRelatedWork W1969330179 @default.
- W2000871889 hasRelatedWork W2024062226 @default.
- W2000871889 hasRelatedWork W2053322805 @default.
- W2000871889 hasRelatedWork W2067393306 @default.
- W2000871889 hasRelatedWork W2111568261 @default.
- W2000871889 hasRelatedWork W2134948224 @default.
- W2000871889 hasRelatedWork W2150801153 @default.
- W2000871889 hasRelatedWork W2510178600 @default.
- W2000871889 hasRelatedWork W4254471017 @default.
- W2000871889 hasRelatedWork W4386091237 @default.
- W2000871889 hasVolume "386" @default.
- W2000871889 isParatext "false" @default.
- W2000871889 isRetracted "false" @default.
- W2000871889 magId "2000871889" @default.
- W2000871889 workType "article" @default.