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• W2000875885 abstract "The reduction of semiconductor device dimensions necessitates, amongst others, a reduction of the line-edge roughness (LER) of the lithographically patterned device components. Experimentally, the impact of many process and material parameters on resist LER has been demonstrated. The impact of some parameters on LER has also been described quantitatively. This paper presents a mesoscopic (i.e., discrete and stochastic) modeling approach including all exposure, post-exposure bake (PEB), and development related parameters and their impact on LER. This allows a prediction of the resulting resist profiles including average dimensions as well as LER. The mesoscopic models are applied for simulating the impact of aerial image contrast, acid diffusion length, and quencher base concentration on LER. The results are compared to experimental data. After this validation of the models, they are applied for LER optimization. The optimum combination of acid and base diffusion length is identified for resist formulations with various levels of base concentration. While the impact of acid diffusion length is already known in principle, it is shown in this paper for the first time how the optimum acid diffusion length depends crucially on base di®usion length and initial base concentration of the resist." @default.
• W2000875885 created "2016-06-24" @default.
• W2000875885 creator A5015413678 @default.
• W2000875885 creator A5083240643 @default.
• W2000875885 date "2008-03-14" @default.
• W2000875885 modified "2023-09-26" @default.
• W2000875885 title "A comprehensive resist model for the prediction of line-edge roughness material and process dependencies in optical lithography" @default.
• W2000875885 cites W1963167649 @default.
• W2000875885 cites W1973830373 @default.
• W2000875885 cites W1989089234 @default.
• W2000875885 cites W1995198835 @default.
• W2000875885 cites W2002659096 @default.
• W2000875885 cites W2004759560 @default.
• W2000875885 cites W2005478667 @default.
• W2000875885 cites W2012993698 @default.
• W2000875885 cites W2013912222 @default.
• W2000875885 cites W2014948129 @default.
• W2000875885 cites W2035788369 @default.
• W2000875885 cites W2035864323 @default.
• W2000875885 cites W2059479936 @default.
• W2000875885 cites W2078734278 @default.
• W2000875885 cites W2083680546 @default.
• W2000875885 cites W2085985801 @default.
• W2000875885 cites W2088070594 @default.
• W2000875885 cites W2104283569 @default.
• W2000875885 cites W2126269750 @default.
• W2000875885 cites W2132487803 @default.
• W2000875885 cites W2482656745 @default.
• W2000875885 cites W2533744870 @default.
• W2000875885 cites W2798368384 @default.
• W2000875885 doi "https://doi.org/10.1117/12.772507" @default.
• W2000875885 hasPublicationYear "2008" @default.
• W2000875885 type Work @default.
• W2000875885 sameAs 2000875885 @default.
• W2000875885 citedByCount "11" @default.
• W2000875885 countsByYear W20008758852013 @default.
• W2000875885 countsByYear W20008758852014 @default.
• W2000875885 countsByYear W20008758852015 @default.
• W2000875885 countsByYear W20008758852017 @default.
• W2000875885 crossrefType "proceedings-article" @default.
• W2000875885 hasAuthorship W2000875885A5015413678 @default.
• W2000875885 hasAuthorship W2000875885A5083240643 @default.
• W2000875885 hasConcept C105487726 @default.
• W2000875885 hasConcept C107365816 @default.
• W2000875885 hasConcept C115961682 @default.
• W2000875885 hasConcept C120665830 @default.
• W2000875885 hasConcept C121332964 @default.
• W2000875885 hasConcept C154945302 @default.
• W2000875885 hasConcept C159985019 @default.
• W2000875885 hasConcept C162307627 @default.
• W2000875885 hasConcept C171250308 @default.
• W2000875885 hasConcept C177731217 @default.
• W2000875885 hasConcept C186060115 @default.
• W2000875885 hasConcept C192562407 @default.
• W2000875885 hasConcept C204223013 @default.
• W2000875885 hasConcept C2776429412 @default.
• W2000875885 hasConcept C2779227376 @default.
• W2000875885 hasConcept C41008148 @default.
• W2000875885 hasConcept C49040817 @default.
• W2000875885 hasConcept C53524968 @default.
• W2000875885 hasConcept C62520636 @default.
• W2000875885 hasConcept C69357855 @default.
• W2000875885 hasConcept C71039073 @default.
• W2000875885 hasConcept C86803240 @default.
• W2000875885 hasConcept C97355855 @default.
• W2000875885 hasConceptScore W2000875885C105487726 @default.
• W2000875885 hasConceptScore W2000875885C107365816 @default.
• W2000875885 hasConceptScore W2000875885C115961682 @default.
• W2000875885 hasConceptScore W2000875885C120665830 @default.
• W2000875885 hasConceptScore W2000875885C121332964 @default.
• W2000875885 hasConceptScore W2000875885C154945302 @default.
• W2000875885 hasConceptScore W2000875885C159985019 @default.
• W2000875885 hasConceptScore W2000875885C162307627 @default.
• W2000875885 hasConceptScore W2000875885C171250308 @default.
• W2000875885 hasConceptScore W2000875885C177731217 @default.
• W2000875885 hasConceptScore W2000875885C186060115 @default.
• W2000875885 hasConceptScore W2000875885C192562407 @default.
• W2000875885 hasConceptScore W2000875885C204223013 @default.
• W2000875885 hasConceptScore W2000875885C2776429412 @default.
• W2000875885 hasConceptScore W2000875885C2779227376 @default.
• W2000875885 hasConceptScore W2000875885C41008148 @default.
• W2000875885 hasConceptScore W2000875885C49040817 @default.
• W2000875885 hasConceptScore W2000875885C53524968 @default.
• W2000875885 hasConceptScore W2000875885C62520636 @default.
• W2000875885 hasConceptScore W2000875885C69357855 @default.
• W2000875885 hasConceptScore W2000875885C71039073 @default.
• W2000875885 hasConceptScore W2000875885C86803240 @default.
• W2000875885 hasConceptScore W2000875885C97355855 @default.
• W2000875885 hasLocation W20008758851 @default.
• W2000875885 hasOpenAccess W2000875885 @default.
• W2000875885 hasPrimaryLocation W20008758851 @default.
• W2000875885 hasRelatedWork W1484277727 @default.
• W2000875885 hasRelatedWork W1991581892 @default.
• W2000875885 hasRelatedWork W1997287005 @default.
• W2000875885 hasRelatedWork W2000875885 @default.
• W2000875885 hasRelatedWork W2021830192 @default.
• W2000875885 hasRelatedWork W2029201719 @default.
• W2000875885 hasRelatedWork W2040707907 @default.
• W2000875885 hasRelatedWork W2041138551 @default.
• W2000875885 hasRelatedWork W2073455725 @default.

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