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- W2000877319 abstract "We investigate the effect of chemical composition and residual stress on the mechanical properties of high-quality epitaxial TiNxOy films deposited on MgO(001) substrates by using nanoindentation. The lattice parameters and residual strain/stress of TiNxOy films decrease as oxygen concentration increases. Hardness and Young's modulus determined by nanoindentation are about 17–26 GPa and 355–430 GPa, respectively, which vary with chemical composition and residual stress." @default.
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- W2000877319 date "2014-07-01" @default.
- W2000877319 modified "2023-09-27" @default.
- W2000877319 title "Structural and nanoindentation studies of epitaxial titanium oxynitride (001) films grown on MgO(001) substrate" @default.
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- W2000877319 doi "https://doi.org/10.1016/j.surfcoat.2014.03.058" @default.
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