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- W2000892746 abstract "The time-resolved optical technique has been applied to RF glow discharge to measure the expansion velocity of the sheath of the RF glow in conjunction with the applied RF voltage. In the technique, the movement of the edge of the negative glow is assumed to indicate the expansion of the electrode sheath thickness. We have proposed a model of the sheath expansion which takes into account acceleration, by RF voltage, of electrons initially in the region from the sheath edge to the floating potential surface relative to the plasma. The values deduced using the model compare well with the experimental results." @default.
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- W2000892746 date "1997-05-01" @default.
- W2000892746 modified "2023-09-23" @default.
- W2000892746 title "Measurement of the Expansion Velocity of the Electrode Sheaths in RF Glow Discharge and Its Physical Mechanism" @default.
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- W2000892746 doi "https://doi.org/10.1143/jjap.36.2865" @default.
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