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- W2000893058 abstract "The effects of a points source on imaging characteristics are examined using a one-dimensional model. Intensity distributions for a line-and-space pattern with 5 lines are calculated and the imaging characteristics are evaluated, compared with those obtained using a plane-source system. In a system with a light source composed of 2 point-sources, the focal tolerance determined from linewidth and contrast becomes maximum. Using a light source composed of 3 point-sources, the line-and-space pattern is imaged with precise linewidths while maintaining a focal tolerance slightly larger than that for the plane-source system." @default.
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- W2000893058 date "1995-01-01" @default.
- W2000893058 modified "2023-09-26" @default.
- W2000893058 title "Imaging in an Optical Projection System with a Light Source Composed of Point Sources" @default.
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- W2000893058 doi "https://doi.org/10.1143/jjap.34.161" @default.
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