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- W2000910493 abstract "A target holder system for ion implantation into hot substrates has been developed. The target is mounted inside a Faraday cup, which is heated with a 750 W spot heater. Temperatures of more than 600°C can be reached within a few minutes. Several Faraday cups are mounted on a wheel, which allows implantation of different substrates at different temperatures and ion doses without breaking the vacuum. The hot target holder can be cooled down rapidly with a movable cold finger, which touches the back of the Faraday cup. Special care in design has been put on accurate dose measurement." @default.
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- W2000910493 date "1981-10-01" @default.
- W2000910493 modified "2023-09-25" @default.
- W2000910493 title "Fast target heating system for ion implantation" @default.
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- W2000910493 doi "https://doi.org/10.1016/0029-554x(81)90138-5" @default.
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