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- W2000914352 endingPage "L455" @default.
- W2000914352 startingPage "L455" @default.
- W2000914352 abstract "Yttria-stabilized zirconia (YSZ) thin films were deposited by reactive sputtering. Various hysteresis curves, such as those in deposition rate and discharge voltage, were observed as functions of oxygen flow rate: The O 2 + , Zr + , Y + , YO + , ZrO + , ZrO 2 + ions incident on the substrate were analyzed by a quadrupole mass spectrometer (QMS) and their behavior during the course of deposition was observed in detail. It is concluded that the Y/Zr ratio in the metallic film is exactly estimated as the arrival ratio of Y + /Zr + ." @default.
- W2000914352 created "2016-06-24" @default.
- W2000914352 creator A5047296754 @default.
- W2000914352 creator A5049478063 @default.
- W2000914352 creator A5051323124 @default.
- W2000914352 creator A5077964650 @default.
- W2000914352 date "1994-03-01" @default.
- W2000914352 modified "2023-09-26" @default.
- W2000914352 title "Studies on Positive Ion Behavior in Reactive Sputtering of Yttria-Stabilized Zirconia (YSZ)" @default.
- W2000914352 cites W1968731261 @default.
- W2000914352 cites W1973202114 @default.
- W2000914352 cites W1973833352 @default.
- W2000914352 cites W1999510761 @default.
- W2000914352 cites W2002388171 @default.
- W2000914352 cites W2013626888 @default.
- W2000914352 cites W2016074881 @default.
- W2000914352 cites W2040870129 @default.
- W2000914352 cites W2043555081 @default.
- W2000914352 doi "https://doi.org/10.1143/jjap.33.l455" @default.
- W2000914352 hasPublicationYear "1994" @default.
- W2000914352 type Work @default.
- W2000914352 sameAs 2000914352 @default.
- W2000914352 citedByCount "4" @default.
- W2000914352 crossrefType "journal-article" @default.
- W2000914352 hasAuthorship W2000914352A5047296754 @default.
- W2000914352 hasAuthorship W2000914352A5049478063 @default.
- W2000914352 hasAuthorship W2000914352A5051323124 @default.
- W2000914352 hasAuthorship W2000914352A5077964650 @default.
- W2000914352 hasConcept C111368507 @default.
- W2000914352 hasConcept C113196181 @default.
- W2000914352 hasConcept C121332964 @default.
- W2000914352 hasConcept C123299182 @default.
- W2000914352 hasConcept C123609680 @default.
- W2000914352 hasConcept C127313418 @default.
- W2000914352 hasConcept C134132462 @default.
- W2000914352 hasConcept C145148216 @default.
- W2000914352 hasConcept C151730666 @default.
- W2000914352 hasConcept C159985019 @default.
- W2000914352 hasConcept C171250308 @default.
- W2000914352 hasConcept C178790620 @default.
- W2000914352 hasConcept C185592680 @default.
- W2000914352 hasConcept C19067145 @default.
- W2000914352 hasConcept C192562407 @default.
- W2000914352 hasConcept C22423302 @default.
- W2000914352 hasConcept C26873012 @default.
- W2000914352 hasConcept C2777289219 @default.
- W2000914352 hasConcept C2816523 @default.
- W2000914352 hasConcept C43617362 @default.
- W2000914352 hasConcept C64297162 @default.
- W2000914352 hasConcept C86803240 @default.
- W2000914352 hasConcept C96410337 @default.
- W2000914352 hasConceptScore W2000914352C111368507 @default.
- W2000914352 hasConceptScore W2000914352C113196181 @default.
- W2000914352 hasConceptScore W2000914352C121332964 @default.
- W2000914352 hasConceptScore W2000914352C123299182 @default.
- W2000914352 hasConceptScore W2000914352C123609680 @default.
- W2000914352 hasConceptScore W2000914352C127313418 @default.
- W2000914352 hasConceptScore W2000914352C134132462 @default.
- W2000914352 hasConceptScore W2000914352C145148216 @default.
- W2000914352 hasConceptScore W2000914352C151730666 @default.
- W2000914352 hasConceptScore W2000914352C159985019 @default.
- W2000914352 hasConceptScore W2000914352C171250308 @default.
- W2000914352 hasConceptScore W2000914352C178790620 @default.
- W2000914352 hasConceptScore W2000914352C185592680 @default.
- W2000914352 hasConceptScore W2000914352C19067145 @default.
- W2000914352 hasConceptScore W2000914352C192562407 @default.
- W2000914352 hasConceptScore W2000914352C22423302 @default.
- W2000914352 hasConceptScore W2000914352C26873012 @default.
- W2000914352 hasConceptScore W2000914352C2777289219 @default.
- W2000914352 hasConceptScore W2000914352C2816523 @default.
- W2000914352 hasConceptScore W2000914352C43617362 @default.
- W2000914352 hasConceptScore W2000914352C64297162 @default.
- W2000914352 hasConceptScore W2000914352C86803240 @default.
- W2000914352 hasConceptScore W2000914352C96410337 @default.
- W2000914352 hasIssue "3B" @default.
- W2000914352 hasLocation W20009143521 @default.
- W2000914352 hasOpenAccess W2000914352 @default.
- W2000914352 hasPrimaryLocation W20009143521 @default.
- W2000914352 hasRelatedWork W1576064947 @default.
- W2000914352 hasRelatedWork W1969337369 @default.
- W2000914352 hasRelatedWork W1976888464 @default.
- W2000914352 hasRelatedWork W1990574691 @default.
- W2000914352 hasRelatedWork W2046386555 @default.
- W2000914352 hasRelatedWork W2064390935 @default.
- W2000914352 hasRelatedWork W2076087596 @default.
- W2000914352 hasRelatedWork W2313158413 @default.
- W2000914352 hasRelatedWork W2336873284 @default.
- W2000914352 hasRelatedWork W3142464101 @default.
- W2000914352 hasVolume "33" @default.
- W2000914352 isParatext "false" @default.
- W2000914352 isRetracted "false" @default.
- W2000914352 magId "2000914352" @default.
- W2000914352 workType "article" @default.