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- W2000939091 abstract "Abstract The intermixing between Mo and Cu under XeCl laser irradiation was studied. The magnetron sputtered Mo Cu multilayers were irradiated at fluences up to 1.4 J cm −2 in vacuum and in nitrogen. Analyses were performed using Rutherford backscattering spectrometry and X-ray diffraction (XRD). The intermixing between Mo and Cu layers as well as SiO 2 underlayer was suppressed by the presence of reactive gases, namely oxygen incorporated into molybdenum. In accordance with the immiscibility of MoCu pair, only Mo and Cu XRD peaks were observed even after laser melting of copper." @default.
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- W2000939091 date "1996-10-01" @default.
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- W2000939091 title "Intermixing in immiscible molybdenum/copper multilayered metallization under excimer laser irradiation" @default.
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- W2000939091 doi "https://doi.org/10.1016/s0169-4332(96)00364-9" @default.
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