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- W2000949094 abstract "This study has explored the role of interstitial oxygen concentration and oxide precipitation on the mechanical response of ion implanted single crystal silicon surfaces. Samples of FZ, CZ and web silicon have been implanted with 50 keV to 150 keV hydrogen ions to fluences of 8 × 10 16 H +/cm 2 to 8 × 10 17 H +/cm 2 at temperatures from 300 K to 650 K. Optical microscopy and surface profilometry have been used to measure blister and crater densities arising from implantation induced stresses and/or hydrogen gas pressure. The formation of oxygen denuded zones and oxide precipitates prior to implantation are shown to have a pronounced effect on the mechanical behaviour of the surface during ion implantation." @default.
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- W2000949094 date "1985-03-01" @default.
- W2000949094 modified "2023-09-28" @default.
- W2000949094 title "Effects of oxygen level and distribution on near-surface phenomena in hydrogen implanted single crystal FZ, CZ, and web silicon" @default.
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- W2000949094 doi "https://doi.org/10.1016/0168-583x(85)90567-1" @default.
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