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- W2000955086 abstract "We have developed a novel ArF resist polymer poly[carboxy- tricyclo(5.3.2.0)decanylmethyl methacrylate] [poly(TCDMACOOH)], which has a carboxyl substituent on the tricyclodecanyl group. This polymer exhibited good solubility (1.93 micrometer/sec) in a 2.38% TMAH solution, high transparency (70%/micrometer) at 193 nm, and a good dry-etching resistance for CF<SUB>4</SUB> gas (1.2 times the etching rate of novolac resin). Furthermore, the resist composed of the partially protected copolymer poly(TCDMACOOH<SUB>60</SUB>-TCDMACOOtBu<SUB>40</SUB>) with a photoacid generator exhibits a resolution of 0.18 micrometer L/S using an ArF exposure system (NA equals 0.55)." @default.
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- W2000955086 date "1996-06-14" @default.
- W2000955086 modified "2023-10-16" @default.
- W2000955086 title "Novel alkaline-soluble alicyclic polymer poly(TCDMACOOH) for ArF chemically amplified positive resists" @default.
- W2000955086 doi "https://doi.org/10.1117/12.241836" @default.
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