Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000962671> ?p ?o ?g. }
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- W2000962671 endingPage "G73" @default.
- W2000962671 startingPage "G73" @default.
- W2000962671 abstract "A new simple and rapid room-temperature silicon masking approach based on the exposure of silicon to -based plasma is presented. This plasma treatment leads to silicon surface modifications appropriate for masking purposes during anisotropic etching in ethylenediamine-pyrocatechol-water (EPW) solutions. The resistance of the mask to EPW etching solutions is studied as a function of plasma radio frequency power and pressure, plasma duration, silicon surface preparation, and aging. Mask resistance increases with increasing power density and decreasing pressure. Plasma duration has a significant effect on the temporal and spatial pattern of defects that evolve during etching and lead eventually to mask destruction. © 2001 The Electrochemical Society. All rights reserved." @default.
- W2000962671 created "2016-06-24" @default.
- W2000962671 creator A5045089827 @default.
- W2000962671 creator A5051466360 @default.
- W2000962671 creator A5059860743 @default.
- W2000962671 creator A5079609193 @default.
- W2000962671 creator A5081192294 @default.
- W2000962671 creator A5084238973 @default.
- W2000962671 date "2001-01-01" @default.
- W2000962671 modified "2023-10-09" @default.
- W2000962671 title "A Masking Approach for Anisotropic Silicon Wet Etching" @default.
- W2000962671 cites W1950804249 @default.
- W2000962671 cites W1989435016 @default.
- W2000962671 cites W2008152918 @default.
- W2000962671 cites W2035167959 @default.
- W2000962671 cites W2040160260 @default.
- W2000962671 cites W2057225362 @default.
- W2000962671 cites W2059032066 @default.
- W2000962671 cites W2069519700 @default.
- W2000962671 cites W2078234874 @default.
- W2000962671 cites W2086581329 @default.
- W2000962671 cites W2094368312 @default.
- W2000962671 cites W2118654775 @default.
- W2000962671 doi "https://doi.org/10.1149/1.1398559" @default.
- W2000962671 hasPublicationYear "2001" @default.
- W2000962671 type Work @default.
- W2000962671 sameAs 2000962671 @default.
- W2000962671 citedByCount "0" @default.
- W2000962671 crossrefType "journal-article" @default.
- W2000962671 hasAuthorship W2000962671A5045089827 @default.
- W2000962671 hasAuthorship W2000962671A5051466360 @default.
- W2000962671 hasAuthorship W2000962671A5059860743 @default.
- W2000962671 hasAuthorship W2000962671A5079609193 @default.
- W2000962671 hasAuthorship W2000962671A5081192294 @default.
- W2000962671 hasAuthorship W2000962671A5084238973 @default.
- W2000962671 hasConcept C100460472 @default.
- W2000962671 hasConcept C107187091 @default.
- W2000962671 hasConcept C120665830 @default.
- W2000962671 hasConcept C121332964 @default.
- W2000962671 hasConcept C130472188 @default.
- W2000962671 hasConcept C142362112 @default.
- W2000962671 hasConcept C153349607 @default.
- W2000962671 hasConcept C171250308 @default.
- W2000962671 hasConcept C192562407 @default.
- W2000962671 hasConcept C2777402240 @default.
- W2000962671 hasConcept C2779227376 @default.
- W2000962671 hasConcept C49040817 @default.
- W2000962671 hasConcept C544956773 @default.
- W2000962671 hasConcept C62520636 @default.
- W2000962671 hasConcept C82706917 @default.
- W2000962671 hasConcept C85725439 @default.
- W2000962671 hasConceptScore W2000962671C100460472 @default.
- W2000962671 hasConceptScore W2000962671C107187091 @default.
- W2000962671 hasConceptScore W2000962671C120665830 @default.
- W2000962671 hasConceptScore W2000962671C121332964 @default.
- W2000962671 hasConceptScore W2000962671C130472188 @default.
- W2000962671 hasConceptScore W2000962671C142362112 @default.
- W2000962671 hasConceptScore W2000962671C153349607 @default.
- W2000962671 hasConceptScore W2000962671C171250308 @default.
- W2000962671 hasConceptScore W2000962671C192562407 @default.
- W2000962671 hasConceptScore W2000962671C2777402240 @default.
- W2000962671 hasConceptScore W2000962671C2779227376 @default.
- W2000962671 hasConceptScore W2000962671C49040817 @default.
- W2000962671 hasConceptScore W2000962671C544956773 @default.
- W2000962671 hasConceptScore W2000962671C62520636 @default.
- W2000962671 hasConceptScore W2000962671C82706917 @default.
- W2000962671 hasConceptScore W2000962671C85725439 @default.
- W2000962671 hasIssue "10" @default.
- W2000962671 hasLocation W20009626711 @default.
- W2000962671 hasOpenAccess W2000962671 @default.
- W2000962671 hasPrimaryLocation W20009626711 @default.
- W2000962671 hasRelatedWork W1332446 @default.
- W2000962671 hasRelatedWork W1653809286 @default.
- W2000962671 hasRelatedWork W2020777840 @default.
- W2000962671 hasRelatedWork W2023718213 @default.
- W2000962671 hasRelatedWork W2035159056 @default.
- W2000962671 hasRelatedWork W2051018996 @default.
- W2000962671 hasRelatedWork W2089438580 @default.
- W2000962671 hasRelatedWork W2093286625 @default.
- W2000962671 hasRelatedWork W2466887265 @default.
- W2000962671 hasRelatedWork W2765886561 @default.
- W2000962671 hasVolume "4" @default.
- W2000962671 isParatext "false" @default.
- W2000962671 isRetracted "false" @default.
- W2000962671 magId "2000962671" @default.
- W2000962671 workType "article" @default.