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- W2000970023 abstract "The Dill ABC parameters for optical resists are typically determined by measuring the change in the intensity of transmitted light at the wavelength of interest as a function of incident energy. The effectiveness of the experiment rests with the fact that the resist optical properties change with exposure and that the optical properties are directly related to the concentration of PAG compound. These conditions are not typically satisfied in CA resists and thus C is unobtainable by this method. FT-IR spectroscopy can directly measure changes in the photoactive species by isolating and measuring absorbance peaks unique to the photoactive species. We employed the ProABC software, specially modified to allow FT-IR absorbance input, to extract ABS parameters through a best fit of the lithography model to experimental data. The quantum efficiency of PAG decomposition at 157-, 193-, and 248-nm was determined for four diazomethane type PAGs in four different polymer matrices. It was found that both the Dill C parameter and the quantum efficiency for all PAGs increased as wavelength decreased, but that the magnitude of the increase was strongly dependent on the polymer matrix." @default.
- W2000970023 created "2016-06-24" @default.
- W2000970023 creator A5045037805 @default.
- W2000970023 creator A5077761178 @default.
- W2000970023 creator A5086639591 @default.
- W2000970023 creator A5087969160 @default.
- W2000970023 date "2003-06-11" @default.
- W2000970023 modified "2023-10-18" @default.
- W2000970023 title "Quantum efficiency of PAG decomposition in different polymer matrices at advanced lithographic wavelengths" @default.
- W2000970023 cites W1972061321 @default.
- W2000970023 doi "https://doi.org/10.1117/12.483705" @default.
- W2000970023 hasPublicationYear "2003" @default.
- W2000970023 type Work @default.
- W2000970023 sameAs 2000970023 @default.
- W2000970023 citedByCount "6" @default.
- W2000970023 countsByYear W20009700232016 @default.
- W2000970023 crossrefType "proceedings-article" @default.
- W2000970023 hasAuthorship W2000970023A5045037805 @default.
- W2000970023 hasAuthorship W2000970023A5077761178 @default.
- W2000970023 hasAuthorship W2000970023A5086639591 @default.
- W2000970023 hasAuthorship W2000970023A5087969160 @default.
- W2000970023 hasConcept C113196181 @default.
- W2000970023 hasConcept C120665830 @default.
- W2000970023 hasConcept C121332964 @default.
- W2000970023 hasConcept C159985019 @default.
- W2000970023 hasConcept C171250308 @default.
- W2000970023 hasConcept C178790620 @default.
- W2000970023 hasConcept C185592680 @default.
- W2000970023 hasConcept C192562407 @default.
- W2000970023 hasConcept C204223013 @default.
- W2000970023 hasConcept C205507967 @default.
- W2000970023 hasConcept C2779227376 @default.
- W2000970023 hasConcept C32891209 @default.
- W2000970023 hasConcept C49040817 @default.
- W2000970023 hasConcept C521977710 @default.
- W2000970023 hasConcept C53524968 @default.
- W2000970023 hasConcept C62520636 @default.
- W2000970023 hasConcept C6260449 @default.
- W2000970023 hasConcept C98015330 @default.
- W2000970023 hasConceptScore W2000970023C113196181 @default.
- W2000970023 hasConceptScore W2000970023C120665830 @default.
- W2000970023 hasConceptScore W2000970023C121332964 @default.
- W2000970023 hasConceptScore W2000970023C159985019 @default.
- W2000970023 hasConceptScore W2000970023C171250308 @default.
- W2000970023 hasConceptScore W2000970023C178790620 @default.
- W2000970023 hasConceptScore W2000970023C185592680 @default.
- W2000970023 hasConceptScore W2000970023C192562407 @default.
- W2000970023 hasConceptScore W2000970023C204223013 @default.
- W2000970023 hasConceptScore W2000970023C205507967 @default.
- W2000970023 hasConceptScore W2000970023C2779227376 @default.
- W2000970023 hasConceptScore W2000970023C32891209 @default.
- W2000970023 hasConceptScore W2000970023C49040817 @default.
- W2000970023 hasConceptScore W2000970023C521977710 @default.
- W2000970023 hasConceptScore W2000970023C53524968 @default.
- W2000970023 hasConceptScore W2000970023C62520636 @default.
- W2000970023 hasConceptScore W2000970023C6260449 @default.
- W2000970023 hasConceptScore W2000970023C98015330 @default.
- W2000970023 hasLocation W20009700231 @default.
- W2000970023 hasOpenAccess W2000970023 @default.
- W2000970023 hasPrimaryLocation W20009700231 @default.
- W2000970023 hasRelatedWork W1980261913 @default.
- W2000970023 hasRelatedWork W2005221043 @default.
- W2000970023 hasRelatedWork W2062151620 @default.
- W2000970023 hasRelatedWork W2478487396 @default.
- W2000970023 hasRelatedWork W2518797246 @default.
- W2000970023 hasRelatedWork W2792297505 @default.
- W2000970023 hasRelatedWork W2914219921 @default.
- W2000970023 hasRelatedWork W4211104017 @default.
- W2000970023 hasRelatedWork W4295915521 @default.
- W2000970023 hasRelatedWork W4307818291 @default.
- W2000970023 isParatext "false" @default.
- W2000970023 isRetracted "false" @default.
- W2000970023 magId "2000970023" @default.
- W2000970023 workType "article" @default.