Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000990029> ?p ?o ?g. }
- W2000990029 endingPage "133" @default.
- W2000990029 startingPage "129" @default.
- W2000990029 abstract "Specimens of 6H–SiC single crystal were irradiated at room temperature with 2.3 MeV neon ions to three successively increasing fluences of 2 × 1014, 1.1 × 1015 and 3.8 × 1015 ions/cm2 and then annealed at room temperature, 500, 700 and 1000 °C, respectively. The strain in the specimens was investigated with a high resolution XRD spectrometer with an ω-2θ scanning. And the mechanical properties were investigated with the nano-indentation in the continuous stiffness measurement (CSM) mode with a diamond Berkovich indenter. The XRD curves of specimens after irradiation show the diffraction peaks arising at lower angles aside of the main Bragg peak ΘBragg, indicating that a positive strain is produced in the implanted layer. In the as-implanted specimens, the strain increases with the increase of the ion fluence or energy deposition. Recovery of the strain occurs on subsequent thermal annealing treatment and two stages of defects evolution process are displayed. An interpretation of defects migration, annihilation and evolution is given to explain the strain variations of the specimens after annealing. The nano-indentation measurements show that the hardness in as-implanted specimens first increases with the increase of the ion fluence, and a degradation of hardness occurs when the ion fluence exceeds a threshold. On the subsequent annealing, the hardness variations are regarded to be a combined effect of the covalent bonding and the pinning effect of defect clusters." @default.
- W2000990029 created "2016-06-24" @default.
- W2000990029 creator A5011633733 @default.
- W2000990029 creator A5027772096 @default.
- W2000990029 creator A5046916742 @default.
- W2000990029 creator A5049367227 @default.
- W2000990029 creator A5050989856 @default.
- W2000990029 creator A5053472353 @default.
- W2000990029 creator A5056714496 @default.
- W2000990029 creator A5075829188 @default.
- W2000990029 creator A5084104444 @default.
- W2000990029 date "2012-09-01" @default.
- W2000990029 modified "2023-10-16" @default.
- W2000990029 title "A HRXRD and nano-indentation study on Ne-implanted 6H–SiC" @default.
- W2000990029 cites W1634624090 @default.
- W2000990029 cites W1969440615 @default.
- W2000990029 cites W1975269712 @default.
- W2000990029 cites W1986943954 @default.
- W2000990029 cites W1989739033 @default.
- W2000990029 cites W1990133610 @default.
- W2000990029 cites W1990403231 @default.
- W2000990029 cites W1990425363 @default.
- W2000990029 cites W1999128652 @default.
- W2000990029 cites W2003475452 @default.
- W2000990029 cites W2006437993 @default.
- W2000990029 cites W2010158130 @default.
- W2000990029 cites W2022674539 @default.
- W2000990029 cites W2024152839 @default.
- W2000990029 cites W2024172140 @default.
- W2000990029 cites W2034789186 @default.
- W2000990029 cites W2045796441 @default.
- W2000990029 cites W2057112936 @default.
- W2000990029 cites W2065213234 @default.
- W2000990029 cites W2069285802 @default.
- W2000990029 cites W2071844760 @default.
- W2000990029 cites W2077878717 @default.
- W2000990029 cites W2087310555 @default.
- W2000990029 cites W2088835222 @default.
- W2000990029 cites W2091870658 @default.
- W2000990029 cites W4253655672 @default.
- W2000990029 doi "https://doi.org/10.1016/j.nimb.2012.01.009" @default.
- W2000990029 hasPublicationYear "2012" @default.
- W2000990029 type Work @default.
- W2000990029 sameAs 2000990029 @default.
- W2000990029 citedByCount "23" @default.
- W2000990029 countsByYear W20009900292013 @default.
- W2000990029 countsByYear W20009900292014 @default.
- W2000990029 countsByYear W20009900292015 @default.
- W2000990029 countsByYear W20009900292016 @default.
- W2000990029 countsByYear W20009900292017 @default.
- W2000990029 countsByYear W20009900292018 @default.
- W2000990029 countsByYear W20009900292020 @default.
- W2000990029 countsByYear W20009900292022 @default.
- W2000990029 countsByYear W20009900292023 @default.
- W2000990029 crossrefType "journal-article" @default.
- W2000990029 hasAuthorship W2000990029A5011633733 @default.
- W2000990029 hasAuthorship W2000990029A5027772096 @default.
- W2000990029 hasAuthorship W2000990029A5046916742 @default.
- W2000990029 hasAuthorship W2000990029A5049367227 @default.
- W2000990029 hasAuthorship W2000990029A5050989856 @default.
- W2000990029 hasAuthorship W2000990029A5053472353 @default.
- W2000990029 hasAuthorship W2000990029A5056714496 @default.
- W2000990029 hasAuthorship W2000990029A5075829188 @default.
- W2000990029 hasAuthorship W2000990029A5084104444 @default.
- W2000990029 hasConcept C111337013 @default.
- W2000990029 hasConcept C113196181 @default.
- W2000990029 hasConcept C121332964 @default.
- W2000990029 hasConcept C145148216 @default.
- W2000990029 hasConcept C147120987 @default.
- W2000990029 hasConcept C159985019 @default.
- W2000990029 hasConcept C165720898 @default.
- W2000990029 hasConcept C185544564 @default.
- W2000990029 hasConcept C185592680 @default.
- W2000990029 hasConcept C192562407 @default.
- W2000990029 hasConcept C202100949 @default.
- W2000990029 hasConcept C22078206 @default.
- W2000990029 hasConcept C2777855556 @default.
- W2000990029 hasConcept C2778711141 @default.
- W2000990029 hasConcept C2780902562 @default.
- W2000990029 hasConcept C2985595821 @default.
- W2000990029 hasConcept C41823505 @default.
- W2000990029 hasConcept C43617362 @default.
- W2000990029 hasConcept C49326732 @default.
- W2000990029 hasConcept C62520636 @default.
- W2000990029 hasConcept C8010536 @default.
- W2000990029 hasConcept C87976508 @default.
- W2000990029 hasConceptScore W2000990029C111337013 @default.
- W2000990029 hasConceptScore W2000990029C113196181 @default.
- W2000990029 hasConceptScore W2000990029C121332964 @default.
- W2000990029 hasConceptScore W2000990029C145148216 @default.
- W2000990029 hasConceptScore W2000990029C147120987 @default.
- W2000990029 hasConceptScore W2000990029C159985019 @default.
- W2000990029 hasConceptScore W2000990029C165720898 @default.
- W2000990029 hasConceptScore W2000990029C185544564 @default.
- W2000990029 hasConceptScore W2000990029C185592680 @default.
- W2000990029 hasConceptScore W2000990029C192562407 @default.
- W2000990029 hasConceptScore W2000990029C202100949 @default.
- W2000990029 hasConceptScore W2000990029C22078206 @default.