FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000999402> ?p ?o ?g. }

• W2000999402 endingPage "177" @default.
• W2000999402 startingPage "170" @default.
• W2000999402 abstract "While double patterning lithography (DPL) is still in active development, triple or even quadruple patterning has recently been proposed for the next technology node. In this paper, we propose a pairwise coloring (PWC) method to tackle the layout decomposition problem for general multiple patterning lithography (MPL). The main idea is to reduce the problem to sets of concurrent bi-coloring problems. The overall solution is refined iteratively by applying a bi-coloring method for pairs of color sets per pass. One obvious advantage of this approach is that the existing DPL techniques can be reused seamlessly. Any improvement of them can directly benefit to the MPL counterpart. Moreover, we observe that with the help of the SPQR-tree graph division method, each pass can be fulfilled in nearly linear time. In addition, to prevent the solution getting stuck in the local minima, a randomized initialization strategy is incorporated. The PWC method is executed certain number of times with different randomized initial solutions, out of which the best solution is selected as output. We have implemented our method for particular triple patterning lithography (TPL). The experimental results show that compared with two recently published methods for TPL, our method can reduce the number of conflicts up to 33.2% and 44.9% respectively." @default.
• W2000999402 created "2016-06-24" @default.
• W2000999402 creator A5037328458 @default.
• W2000999402 creator A5052779900 @default.
• W2000999402 creator A5064213921 @default.
• W2000999402 creator A5079441764 @default.
• W2000999402 creator A5082117229 @default.
• W2000999402 date "2013-11-18" @default.
• W2000999402 modified "2023-09-24" @default.
• W2000999402 title "Layout decomposition with pairwise coloring for multiple patterning lithography" @default.
• W2000999402 cites W1534309112 @default.
• W2000999402 cites W1983920947 @default.
• W2000999402 cites W1994556169 @default.
• W2000999402 cites W2001368028 @default.
• W2000999402 cites W2018868256 @default.
• W2000999402 cites W2032622168 @default.
• W2000999402 cites W2047394675 @default.
• W2000999402 cites W2053242939 @default.
• W2000999402 cites W2073705438 @default.
• W2000999402 cites W2108069061 @default.
• W2000999402 cites W2108190170 @default.
• W2000999402 cites W2137560895 @default.
• W2000999402 cites W2140291285 @default.
• W2000999402 cites W2142753649 @default.
• W2000999402 cites W2152190733 @default.
• W2000999402 cites W2156916628 @default.
• W2000999402 cites W2159287000 @default.
• W2000999402 cites W2164380619 @default.
• W2000999402 cites W2170734407 @default.
• W2000999402 cites W2172169799 @default.
• W2000999402 cites W3144099024 @default.
• W2000999402 cites W3149318025 @default.
• W2000999402 cites W3149715914 @default.
• W2000999402 cites W3150135088 @default.
• W2000999402 doi "https://doi.org/10.5555/2561828.2561864" @default.
• W2000999402 hasPublicationYear "2013" @default.
• W2000999402 type Work @default.
• W2000999402 sameAs 2000999402 @default.
• W2000999402 citedByCount "18" @default.
• W2000999402 countsByYear W20009994022014 @default.
• W2000999402 countsByYear W20009994022015 @default.
• W2000999402 countsByYear W20009994022016 @default.
• W2000999402 countsByYear W20009994022017 @default.
• W2000999402 countsByYear W20009994022018 @default.
• W2000999402 countsByYear W20009994022019 @default.
• W2000999402 countsByYear W20009994022020 @default.
• W2000999402 crossrefType "proceedings-article" @default.
• W2000999402 hasAuthorship W2000999402A5037328458 @default.
• W2000999402 hasAuthorship W2000999402A5052779900 @default.
• W2000999402 hasAuthorship W2000999402A5064213921 @default.
• W2000999402 hasAuthorship W2000999402A5079441764 @default.
• W2000999402 hasAuthorship W2000999402A5082117229 @default.
• W2000999402 hasConcept C11413529 @default.
• W2000999402 hasConcept C114466953 @default.
• W2000999402 hasConcept C120665830 @default.
• W2000999402 hasConcept C121332964 @default.
• W2000999402 hasConcept C124681953 @default.
• W2000999402 hasConcept C127413603 @default.
• W2000999402 hasConcept C132525143 @default.
• W2000999402 hasConcept C134306372 @default.
• W2000999402 hasConcept C154945302 @default.
• W2000999402 hasConcept C163581340 @default.
• W2000999402 hasConcept C171250308 @default.
• W2000999402 hasConcept C173608175 @default.
• W2000999402 hasConcept C177409738 @default.
• W2000999402 hasConcept C184898388 @default.
• W2000999402 hasConcept C186633575 @default.
• W2000999402 hasConcept C18903297 @default.
• W2000999402 hasConcept C192562407 @default.
• W2000999402 hasConcept C199360897 @default.
• W2000999402 hasConcept C200274948 @default.
• W2000999402 hasConcept C204223013 @default.
• W2000999402 hasConcept C2779227376 @default.
• W2000999402 hasConcept C33923547 @default.
• W2000999402 hasConcept C41008148 @default.
• W2000999402 hasConcept C53524968 @default.
• W2000999402 hasConcept C62611344 @default.
• W2000999402 hasConcept C66938386 @default.
• W2000999402 hasConcept C76946457 @default.
• W2000999402 hasConcept C80444323 @default.
• W2000999402 hasConcept C86803240 @default.
• W2000999402 hasConceptScore W2000999402C11413529 @default.
• W2000999402 hasConceptScore W2000999402C114466953 @default.
• W2000999402 hasConceptScore W2000999402C120665830 @default.
• W2000999402 hasConceptScore W2000999402C121332964 @default.
• W2000999402 hasConceptScore W2000999402C124681953 @default.
• W2000999402 hasConceptScore W2000999402C127413603 @default.
• W2000999402 hasConceptScore W2000999402C132525143 @default.
• W2000999402 hasConceptScore W2000999402C134306372 @default.
• W2000999402 hasConceptScore W2000999402C154945302 @default.
• W2000999402 hasConceptScore W2000999402C163581340 @default.
• W2000999402 hasConceptScore W2000999402C171250308 @default.
• W2000999402 hasConceptScore W2000999402C173608175 @default.
• W2000999402 hasConceptScore W2000999402C177409738 @default.
• W2000999402 hasConceptScore W2000999402C184898388 @default.
• W2000999402 hasConceptScore W2000999402C186633575 @default.
• W2000999402 hasConceptScore W2000999402C18903297 @default.
• W2000999402 hasConceptScore W2000999402C192562407 @default.

• next