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- W2001032148 endingPage "5119" @default.
- W2001032148 startingPage "5116" @default.
- W2001032148 abstract "Abstract In this study, n-type silicon specimens were liquid nitrogen temperature (LT) and room temperature (RT) implanted with 2 × 1015 cm−2 77 keV BSi molecular ions to produce shallow junctions. Post-annealing methods under investigation included furnace annealing (FA) at 550 °C for 0.5, 1, 2, 3 and 5 h and rapid thermal annealing (RTA) at 1050 °C for 25 s. Post-annealing effects on the shallow-junction characteristics were examined using one-step (FA) and two-step (FA + RTA) post-annealing treatments. Secondary ion mass spectrometry (SIMS), cross-sectional transmission electron microscopy (XTEM), a four-point probe and Raman scattering spectroscopy (RSS) were employed to analyze junction depths (xj), damage microstructures, sheet resistance (Rs) and damage characteristics, respectively. The results revealed that the shallow-junction characteristics of the LT implant are better than those of the RT one when post-annealing time in FA exceeds 1 h. A post-annealing time of 3 h in FA is needed in order to obtain the optimal one- or two-step post-annealing effects on the shallow-junction characteristics in both the LT and RT implants." @default.
- W2001032148 created "2016-06-24" @default.
- W2001032148 creator A5063561826 @default.
- W2001032148 creator A5077875767 @default.
- W2001032148 date "2008-12-01" @default.
- W2001032148 modified "2023-09-29" @default.
- W2001032148 title "Post-annealing effects on the shallow-junction characteristics caused by high-fluence 77keV BSi molecular ion implantations at room and liquid nitrogen temperatures" @default.
- W2001032148 cites W1965716614 @default.
- W2001032148 cites W1970804267 @default.
- W2001032148 cites W1972234246 @default.
- W2001032148 cites W1972266599 @default.
- W2001032148 cites W1979415899 @default.
- W2001032148 cites W1981788776 @default.
- W2001032148 cites W1982642499 @default.
- W2001032148 cites W1991282853 @default.
- W2001032148 cites W2009117737 @default.
- W2001032148 cites W2012790797 @default.
- W2001032148 cites W2021916653 @default.
- W2001032148 cites W2025357319 @default.
- W2001032148 cites W2028806527 @default.
- W2001032148 cites W2038766735 @default.
- W2001032148 cites W2045515033 @default.
- W2001032148 cites W2048648585 @default.
- W2001032148 cites W2049108577 @default.
- W2001032148 cites W2058962612 @default.
- W2001032148 cites W2060168620 @default.
- W2001032148 cites W2082174877 @default.
- W2001032148 cites W2106352231 @default.
- W2001032148 cites W2798803155 @default.
- W2001032148 cites W2987637782 @default.
- W2001032148 doi "https://doi.org/10.1016/j.nimb.2008.10.002" @default.
- W2001032148 hasPublicationYear "2008" @default.
- W2001032148 type Work @default.
- W2001032148 sameAs 2001032148 @default.
- W2001032148 citedByCount "0" @default.
- W2001032148 crossrefType "journal-article" @default.
- W2001032148 hasAuthorship W2001032148A5063561826 @default.
- W2001032148 hasAuthorship W2001032148A5077875767 @default.
- W2001032148 hasConcept C108939769 @default.
- W2001032148 hasConcept C145148216 @default.
- W2001032148 hasConcept C178790620 @default.
- W2001032148 hasConcept C185592680 @default.
- W2001032148 hasConcept C191897082 @default.
- W2001032148 hasConcept C192562407 @default.
- W2001032148 hasConcept C22078206 @default.
- W2001032148 hasConcept C2777855556 @default.
- W2001032148 hasConcept C537208039 @default.
- W2001032148 hasConceptScore W2001032148C108939769 @default.
- W2001032148 hasConceptScore W2001032148C145148216 @default.
- W2001032148 hasConceptScore W2001032148C178790620 @default.
- W2001032148 hasConceptScore W2001032148C185592680 @default.
- W2001032148 hasConceptScore W2001032148C191897082 @default.
- W2001032148 hasConceptScore W2001032148C192562407 @default.
- W2001032148 hasConceptScore W2001032148C22078206 @default.
- W2001032148 hasConceptScore W2001032148C2777855556 @default.
- W2001032148 hasConceptScore W2001032148C537208039 @default.
- W2001032148 hasIssue "24" @default.
- W2001032148 hasLocation W20010321481 @default.
- W2001032148 hasOpenAccess W2001032148 @default.
- W2001032148 hasPrimaryLocation W20010321481 @default.
- W2001032148 hasRelatedWork W1634117462 @default.
- W2001032148 hasRelatedWork W1975333773 @default.
- W2001032148 hasRelatedWork W2027660155 @default.
- W2001032148 hasRelatedWork W2035018492 @default.
- W2001032148 hasRelatedWork W2046438980 @default.
- W2001032148 hasRelatedWork W2048867833 @default.
- W2001032148 hasRelatedWork W2067621957 @default.
- W2001032148 hasRelatedWork W2068961810 @default.
- W2001032148 hasRelatedWork W2081241215 @default.
- W2001032148 hasRelatedWork W2094423372 @default.
- W2001032148 hasVolume "266" @default.
- W2001032148 isParatext "false" @default.
- W2001032148 isRetracted "false" @default.
- W2001032148 magId "2001032148" @default.
- W2001032148 workType "article" @default.