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- W2001072012 abstract "We report on what we believe to be a novel classification method for polishing processes that we apply in our laboratory on a regular basis. Two parameters are deduced from the in situ iTIRM (intensity-detecting total-internal-reflection microscopy) measurement method. Contrary to Preston's law, which gives the removal rate, the parameters of the iTIRM process are a measure of the change in surface quality (roughness, subsurface damage, and scratch and dig) and the duration of the polishing process." @default.
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- W2001072012 date "2002-07-01" @default.
- W2001072012 modified "2023-09-26" @default.
- W2001072012 title "iTIRM as a tool for qualifying polishing processes" @default.
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- W2001072012 doi "https://doi.org/10.1364/ao.41.004036" @default.
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