Matches in SemOpenAlex for { <https://semopenalex.org/work/W2001263811> ?p ?o ?g. }
Showing items 1 to 79 of
79
with 100 items per page.
- W2001263811 endingPage "2349" @default.
- W2001263811 startingPage "2349" @default.
- W2001263811 abstract "An ultrahigh-vacuum (UHV) contactless capacitance-voltage ( C - V ) technique was developed and applied to various silicon (Si) wafers. The system carries out C - V measurements in a UHV chamber from a field plate separated from the sample surface by a UHV-gap. The UHV-gap length was shown to be accurately determined by measuring the variation of reflectance of the laser light due to the Goos-Hächen effect. It was demonstrated that the conduction type, carrier concentration and surface Fermi level position could be determined on the Si surface before and after processing. Surface state distributions such as hydrogen terminated surfaces and Si surface covered with an ultrathin insulator were successfully characterized by an in-situ and a nondestructive fashion in UHV environments. This method seems to be very powerful for in-situ electronic characterization of “free” and/or “processed” semiconductor surfaces." @default.
- W2001263811 created "2016-06-24" @default.
- W2001263811 creator A5011556710 @default.
- W2001263811 creator A5028934181 @default.
- W2001263811 creator A5082452145 @default.
- W2001263811 date "1999-04-01" @default.
- W2001263811 modified "2023-09-26" @default.
- W2001263811 title "A Novel Non-Destructive Characterization Method of Electronic Properties of Pre- and Post-Processing Silicon Surfaces Based on Ultrahigh-Vacuum Contactless Capacitance-Voltage Measurements" @default.
- W2001263811 cites W1992982687 @default.
- W2001263811 cites W2008209189 @default.
- W2001263811 cites W2032686619 @default.
- W2001263811 cites W2033059430 @default.
- W2001263811 cites W2034707451 @default.
- W2001263811 cites W2035975895 @default.
- W2001263811 cites W2040213180 @default.
- W2001263811 cites W2063140846 @default.
- W2001263811 cites W2070381542 @default.
- W2001263811 cites W2080698427 @default.
- W2001263811 cites W2086596421 @default.
- W2001263811 cites W2089392512 @default.
- W2001263811 cites W2038240401 @default.
- W2001263811 doi "https://doi.org/10.1143/jjap.38.2349" @default.
- W2001263811 hasPublicationYear "1999" @default.
- W2001263811 type Work @default.
- W2001263811 sameAs 2001263811 @default.
- W2001263811 citedByCount "12" @default.
- W2001263811 countsByYear W20012638112012 @default.
- W2001263811 countsByYear W20012638112014 @default.
- W2001263811 crossrefType "journal-article" @default.
- W2001263811 hasAuthorship W2001263811A5011556710 @default.
- W2001263811 hasAuthorship W2001263811A5028934181 @default.
- W2001263811 hasAuthorship W2001263811A5082452145 @default.
- W2001263811 hasConcept C108225325 @default.
- W2001263811 hasConcept C113196181 @default.
- W2001263811 hasConcept C147789679 @default.
- W2001263811 hasConcept C160671074 @default.
- W2001263811 hasConcept C171250308 @default.
- W2001263811 hasConcept C17525397 @default.
- W2001263811 hasConcept C185592680 @default.
- W2001263811 hasConcept C192562407 @default.
- W2001263811 hasConcept C2780841128 @default.
- W2001263811 hasConcept C30066665 @default.
- W2001263811 hasConcept C43617362 @default.
- W2001263811 hasConcept C49040817 @default.
- W2001263811 hasConcept C544956773 @default.
- W2001263811 hasConceptScore W2001263811C108225325 @default.
- W2001263811 hasConceptScore W2001263811C113196181 @default.
- W2001263811 hasConceptScore W2001263811C147789679 @default.
- W2001263811 hasConceptScore W2001263811C160671074 @default.
- W2001263811 hasConceptScore W2001263811C171250308 @default.
- W2001263811 hasConceptScore W2001263811C17525397 @default.
- W2001263811 hasConceptScore W2001263811C185592680 @default.
- W2001263811 hasConceptScore W2001263811C192562407 @default.
- W2001263811 hasConceptScore W2001263811C2780841128 @default.
- W2001263811 hasConceptScore W2001263811C30066665 @default.
- W2001263811 hasConceptScore W2001263811C43617362 @default.
- W2001263811 hasConceptScore W2001263811C49040817 @default.
- W2001263811 hasConceptScore W2001263811C544956773 @default.
- W2001263811 hasIssue "4S" @default.
- W2001263811 hasLocation W20012638111 @default.
- W2001263811 hasOpenAccess W2001263811 @default.
- W2001263811 hasPrimaryLocation W20012638111 @default.
- W2001263811 hasRelatedWork W1536397480 @default.
- W2001263811 hasRelatedWork W1992476100 @default.
- W2001263811 hasRelatedWork W2010481829 @default.
- W2001263811 hasRelatedWork W2046703922 @default.
- W2001263811 hasRelatedWork W2111385852 @default.
- W2001263811 hasRelatedWork W2314841554 @default.
- W2001263811 hasRelatedWork W2384334620 @default.
- W2001263811 hasRelatedWork W2487619154 @default.
- W2001263811 hasRelatedWork W249743656 @default.
- W2001263811 hasRelatedWork W762019970 @default.
- W2001263811 hasVolume "38" @default.
- W2001263811 isParatext "false" @default.
- W2001263811 isRetracted "false" @default.
- W2001263811 magId "2001263811" @default.
- W2001263811 workType "article" @default.