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- W2001286611 abstract "We show that a conformal mapping of the type, W = z π/α, describes how a shape of a 45° rotated cross transforms into a contact hole. We discuss its relevance to corner rounding seen on raster beam pattern generators." @default.
- W2001286611 created "2016-06-24" @default.
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- W2001286611 date "2004-12-06" @default.
- W2001286611 modified "2023-10-16" @default.
- W2001286611 title "Conformal mapping in microlithography" @default.
- W2001286611 doi "https://doi.org/10.1117/12.561106" @default.
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