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- W2001366951 abstract "We have evaluated hydrogen and deuterium diffusivities in silicon below room temperature (220–270 K) by analyzing the kinetics of photoinduced dissociation of a chemical etching introduced hydrogen (deuterium)–carbon complex. Under sufficiently strong illumination, the annihilation rate of the complex was proportional to the phosphorus density, indicating that the rate-determining step is the diffusion of hydrogen (deuterium) to phosphorus atoms. Applying the diffusion-controlled reaction theory, we have evaluated the diffusion coefficients as 7×10−2exp(−0.54 eV/kT) cm2 s−1 for hydrogen and 5×10−3exp(−0.49 eV/kT) cm2 s−1 for deuterium, being in good agreement with the extrapolation of the high-temperature diffusion data of A. Van Wieringen and N. Warmoltz [Physica 22, 849 (1956)]." @default.
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- W2001366951 date "1991-12-09" @default.
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- W2001366951 title "Hydrogen diffusivities below room temperature in silicon evaluated from the photoinduced dissociation of hydrogen–carbon complexes" @default.
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- W2001366951 doi "https://doi.org/10.1063/1.105772" @default.
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