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- W2001395207 abstract "Abstract Channeling effects of high energy (1 MeV) P ions implanted into Si(100) crystalline targets have been calculated using the Monte Carlo simulation code MARLOWE. Ion implantation ranges have been obtained at various implantation conditions such as incident angles, target temperatures, and incident beam divergence. The influence of disordered (amorphous) surface layers on the channeling effect has also been studied." @default.
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- W2001395207 date "1989-02-01" @default.
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- W2001395207 title "Monte Carlo simulation of channeling effects in high energy (MeV) phosphorus ion implantation into crystalline silicon targets" @default.
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- W2001395207 doi "https://doi.org/10.1016/0168-583x(89)90337-6" @default.
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