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- W2001508423 abstract "SAW Pirani sensors are a promising solution for low pressure monitoring. We present here the first results obtained with a new packaging solution based on CSSP technology. Pressure sensitivity and good response time are demonstrated experimentally. A model is developed to account for the sensor's behavior, including an observed slow drift. The paper concludes with a short discussion of the SAW Pirani sensor's industrial potential." @default.
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- W2001508423 date "2012-10-01" @default.
- W2001508423 modified "2023-09-24" @default.
- W2001508423 title "A miniaturized SAW-PIRANI sensor" @default.
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- W2001508423 doi "https://doi.org/10.1109/ultsym.2012.0385" @default.
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