Matches in SemOpenAlex for { <https://semopenalex.org/work/W2001593728> ?p ?o ?g. }
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- W2001593728 endingPage "207" @default.
- W2001593728 startingPage "203" @default.
- W2001593728 abstract "Phosphorus ions have been implanted in p-type, (11–20)-oriented 4H–SiC to fabricate highly doped n-type layers, with a box-shaped electrical profile, in the substrate. It has been shown that an implantation-induced amorphous layer epitaxially re-crystallizes during annealing at 1000 °C. Electrical profile measurements have been successfully made on samples annealed at/above 1200 °C. An ∼100 nm-thick n-type layer, uniformly doped at carrier concentrations of ∼1 × 10 20 cm −3 , is formed after annealing at 1500 °C and an extremely low resistivity of 1.4 × 10 −3 Ω cm is achieved in the P-implanted layer. It is also demonstrated that a considerable large number of P atoms are lost from the substrate during annealing above 1400 °C. The surface morphology of P-implanted 4H–SiC is deteriorated when annealed at 1600 °C." @default.
- W2001593728 created "2016-06-24" @default.
- W2001593728 creator A5009949261 @default.
- W2001593728 creator A5016763013 @default.
- W2001593728 creator A5041419170 @default.
- W2001593728 creator A5071376968 @default.
- W2001593728 date "2007-04-01" @default.
- W2001593728 modified "2023-10-18" @default.
- W2001593728 title "Characterization of n-type layers formed in (11–20)-4H–SiC by phosphorus ion implantation" @default.
- W2001593728 cites W1963993010 @default.
- W2001593728 cites W1972214076 @default.
- W2001593728 cites W1984161941 @default.
- W2001593728 cites W2007538907 @default.
- W2001593728 cites W2031769201 @default.
- W2001593728 cites W2033090048 @default.
- W2001593728 cites W2041922818 @default.
- W2001593728 cites W2044818634 @default.
- W2001593728 cites W2053940759 @default.
- W2001593728 cites W2057546128 @default.
- W2001593728 cites W2089811193 @default.
- W2001593728 cites W2160286674 @default.
- W2001593728 doi "https://doi.org/10.1016/j.nimb.2007.01.241" @default.
- W2001593728 hasPublicationYear "2007" @default.
- W2001593728 type Work @default.
- W2001593728 sameAs 2001593728 @default.
- W2001593728 citedByCount "11" @default.
- W2001593728 countsByYear W20015937282013 @default.
- W2001593728 countsByYear W20015937282014 @default.
- W2001593728 countsByYear W20015937282015 @default.
- W2001593728 countsByYear W20015937282016 @default.
- W2001593728 countsByYear W20015937282017 @default.
- W2001593728 countsByYear W20015937282019 @default.
- W2001593728 countsByYear W20015937282023 @default.
- W2001593728 crossrefType "journal-article" @default.
- W2001593728 hasAuthorship W2001593728A5009949261 @default.
- W2001593728 hasAuthorship W2001593728A5016763013 @default.
- W2001593728 hasAuthorship W2001593728A5041419170 @default.
- W2001593728 hasAuthorship W2001593728A5071376968 @default.
- W2001593728 hasConcept C110738630 @default.
- W2001593728 hasConcept C113196181 @default.
- W2001593728 hasConcept C119599485 @default.
- W2001593728 hasConcept C127413603 @default.
- W2001593728 hasConcept C145148216 @default.
- W2001593728 hasConcept C159985019 @default.
- W2001593728 hasConcept C178790620 @default.
- W2001593728 hasConcept C185592680 @default.
- W2001593728 hasConcept C192562407 @default.
- W2001593728 hasConcept C2777855556 @default.
- W2001593728 hasConcept C2779227376 @default.
- W2001593728 hasConcept C41823505 @default.
- W2001593728 hasConcept C43617362 @default.
- W2001593728 hasConcept C49040817 @default.
- W2001593728 hasConcept C56052488 @default.
- W2001593728 hasConcept C57863236 @default.
- W2001593728 hasConcept C69990965 @default.
- W2001593728 hasConcept C8010536 @default.
- W2001593728 hasConceptScore W2001593728C110738630 @default.
- W2001593728 hasConceptScore W2001593728C113196181 @default.
- W2001593728 hasConceptScore W2001593728C119599485 @default.
- W2001593728 hasConceptScore W2001593728C127413603 @default.
- W2001593728 hasConceptScore W2001593728C145148216 @default.
- W2001593728 hasConceptScore W2001593728C159985019 @default.
- W2001593728 hasConceptScore W2001593728C178790620 @default.
- W2001593728 hasConceptScore W2001593728C185592680 @default.
- W2001593728 hasConceptScore W2001593728C192562407 @default.
- W2001593728 hasConceptScore W2001593728C2777855556 @default.
- W2001593728 hasConceptScore W2001593728C2779227376 @default.
- W2001593728 hasConceptScore W2001593728C41823505 @default.
- W2001593728 hasConceptScore W2001593728C43617362 @default.
- W2001593728 hasConceptScore W2001593728C49040817 @default.
- W2001593728 hasConceptScore W2001593728C56052488 @default.
- W2001593728 hasConceptScore W2001593728C57863236 @default.
- W2001593728 hasConceptScore W2001593728C69990965 @default.
- W2001593728 hasConceptScore W2001593728C8010536 @default.
- W2001593728 hasIssue "1-2" @default.
- W2001593728 hasLocation W20015937281 @default.
- W2001593728 hasOpenAccess W2001593728 @default.
- W2001593728 hasPrimaryLocation W20015937281 @default.
- W2001593728 hasRelatedWork W2007522409 @default.
- W2001593728 hasRelatedWork W2026116228 @default.
- W2001593728 hasRelatedWork W2032643698 @default.
- W2001593728 hasRelatedWork W2091249699 @default.
- W2001593728 hasRelatedWork W2139871202 @default.
- W2001593728 hasRelatedWork W2341423334 @default.
- W2001593728 hasRelatedWork W2619705024 @default.
- W2001593728 hasRelatedWork W2743194952 @default.
- W2001593728 hasRelatedWork W2916927051 @default.
- W2001593728 hasRelatedWork W3023214042 @default.
- W2001593728 hasVolume "257" @default.
- W2001593728 isParatext "false" @default.
- W2001593728 isRetracted "false" @default.
- W2001593728 magId "2001593728" @default.
- W2001593728 workType "article" @default.