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• W2001643208 abstract "Diamond thin films have been formed on molybdenum substrates with a mixture of methane and hydrogen gas using the electron-assisted chemical vapor deposition (EACVD) method. The surface morphology, crystal structure and composition of the films obtained were characterized by scanning electron microscopy, reflection high energy electron diffraction and secondary ion mass spectrometry. The experimental results revealed that substrate heating is necessary to eliminate the hydrogen atoms occluded into the film during the course of diamond deposition. The hydrogen is frozen in the film without the substrate heating. This may prohibit the rearrangement of the carbon atoms in the film and will produce an amorphous film." @default.
• W2001643208 created "2016-06-24" @default.
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• W2001643208 date "1988-09-01" @default.
• W2001643208 modified "2023-09-23" @default.
• W2001643208 title "Influence of substrate- and atmospheric-temperatures on diamond deposition" @default.
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• W2001643208 doi "https://doi.org/10.1016/0169-4332(88)90351-0" @default.
• W2001643208 hasPublicationYear "1988" @default.
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