Matches in SemOpenAlex for { <https://semopenalex.org/work/W2001645470> ?p ?o ?g. }
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- W2001645470 endingPage "229" @default.
- W2001645470 startingPage "220" @default.
- W2001645470 abstract "A differentially piezoresistive (piezo-R) readout proposed for single-crystal-silicon (SCS) microelectromechanical systems (MEMS) resonators is implemented in a foundry-based resonator platform, demonstrating effective feedthrough cancellation using just simple piezoresistors from the resonator supports while maximizing their capacitively transduced driving areas. The SCS resonators are fabricated by a CMOS foundry using an SOI-MEMS technology together with a polysilicon refill process. A high electromechanical coupling coefficient is attained by the use of 50-nm transducer gap spacing. Moreover, a vacuum package of the fabricated resonators is carried out through wafer-level bonding process. In this work, the corner supporting beams of the resonator serve not only mechanical supports but also piezoresistors for detecting the motional signal, hence substantially simplifying the overall resonator design to realize the piezo-R sensing. In addition, the fabricated resonators are capable of either capacitive sensing or piezo-R detection under the same capacitive drive. To mitigate feedthrough signals from parasitics, a differential measurement configuration of the piezo-R transduction is implemented in this work, featuring more than 30-dB improvement on the feedthrough level as compared with the single-ended piezo-R counterpart and purely capacitive sensing readout. Furthermore, the high-Q design of the mechanical supports is also investigated, offering Q more than 10 000 with efficient piezo-R transduction for MEMS resonators." @default.
- W2001645470 created "2016-06-24" @default.
- W2001645470 creator A5075171288 @default.
- W2001645470 creator A5087490634 @default.
- W2001645470 creator A5089136999 @default.
- W2001645470 date "2015-01-01" @default.
- W2001645470 modified "2023-10-18" @default.
- W2001645470 title "Differentially piezoresistive transduction of high-q encapsulated SOI-MEMS resonators with sub-100 nm gaps" @default.
- W2001645470 cites W1979204136 @default.
- W2001645470 cites W1983757401 @default.
- W2001645470 cites W2006661615 @default.
- W2001645470 cites W2014135241 @default.
- W2001645470 cites W2033925310 @default.
- W2001645470 cites W2059507240 @default.
- W2001645470 cites W2081677403 @default.
- W2001645470 cites W2084709550 @default.
- W2001645470 cites W2090384543 @default.
- W2001645470 cites W2095929384 @default.
- W2001645470 cites W2105093937 @default.
- W2001645470 cites W2105973362 @default.
- W2001645470 cites W2108062947 @default.
- W2001645470 cites W2110960420 @default.
- W2001645470 cites W2124535040 @default.
- W2001645470 cites W2168369249 @default.
- W2001645470 cites W2169832302 @default.
- W2001645470 cites W249875913 @default.
- W2001645470 doi "https://doi.org/10.1109/tuffc.2014.006470" @default.
- W2001645470 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/25585404" @default.
- W2001645470 hasPublicationYear "2015" @default.
- W2001645470 type Work @default.
- W2001645470 sameAs 2001645470 @default.
- W2001645470 citedByCount "3" @default.
- W2001645470 countsByYear W20016454702018 @default.
- W2001645470 countsByYear W20016454702021 @default.
- W2001645470 countsByYear W20016454702022 @default.
- W2001645470 crossrefType "journal-article" @default.
- W2001645470 hasAuthorship W2001645470A5075171288 @default.
- W2001645470 hasAuthorship W2001645470A5087490634 @default.
- W2001645470 hasAuthorship W2001645470A5089136999 @default.
- W2001645470 hasConcept C119599485 @default.
- W2001645470 hasConcept C127413603 @default.
- W2001645470 hasConcept C192562407 @default.
- W2001645470 hasConcept C198490522 @default.
- W2001645470 hasConcept C206755178 @default.
- W2001645470 hasConcept C24326235 @default.
- W2001645470 hasConcept C2777303812 @default.
- W2001645470 hasConcept C37977207 @default.
- W2001645470 hasConcept C46362747 @default.
- W2001645470 hasConcept C49040817 @default.
- W2001645470 hasConcept C53143962 @default.
- W2001645470 hasConcept C544956773 @default.
- W2001645470 hasConcept C91397564 @default.
- W2001645470 hasConcept C97126364 @default.
- W2001645470 hasConceptScore W2001645470C119599485 @default.
- W2001645470 hasConceptScore W2001645470C127413603 @default.
- W2001645470 hasConceptScore W2001645470C192562407 @default.
- W2001645470 hasConceptScore W2001645470C198490522 @default.
- W2001645470 hasConceptScore W2001645470C206755178 @default.
- W2001645470 hasConceptScore W2001645470C24326235 @default.
- W2001645470 hasConceptScore W2001645470C2777303812 @default.
- W2001645470 hasConceptScore W2001645470C37977207 @default.
- W2001645470 hasConceptScore W2001645470C46362747 @default.
- W2001645470 hasConceptScore W2001645470C49040817 @default.
- W2001645470 hasConceptScore W2001645470C53143962 @default.
- W2001645470 hasConceptScore W2001645470C544956773 @default.
- W2001645470 hasConceptScore W2001645470C91397564 @default.
- W2001645470 hasConceptScore W2001645470C97126364 @default.
- W2001645470 hasIssue "1" @default.
- W2001645470 hasLocation W20016454701 @default.
- W2001645470 hasLocation W20016454702 @default.
- W2001645470 hasOpenAccess W2001645470 @default.
- W2001645470 hasPrimaryLocation W20016454701 @default.
- W2001645470 hasRelatedWork W2001645470 @default.
- W2001645470 hasRelatedWork W2007286867 @default.
- W2001645470 hasRelatedWork W2031096873 @default.
- W2001645470 hasRelatedWork W2068554005 @default.
- W2001645470 hasRelatedWork W2085076389 @default.
- W2001645470 hasRelatedWork W2117181836 @default.
- W2001645470 hasRelatedWork W2137947448 @default.
- W2001645470 hasRelatedWork W2742663518 @default.
- W2001645470 hasRelatedWork W4210332894 @default.
- W2001645470 hasRelatedWork W4308314564 @default.
- W2001645470 hasVolume "62" @default.
- W2001645470 isParatext "false" @default.
- W2001645470 isRetracted "false" @default.
- W2001645470 magId "2001645470" @default.
- W2001645470 workType "article" @default.