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• W2001662993 abstract "Impedance spectroscopy measurements were carried out in situ on lead zirconate titanate capacitors 1.2×1.2 μm2 in size on a Samsung 4 Mbit 6 in, wafer. We show here that large dielectric loss appears at low frequencies, which is a constriction effect due to the porosity of the platinum electrode. Porous platinum electrodes facilitate an oxygen electrode reaction. The effect may be removed by annealing the platinum electrode at moderate temperature (300 °C). Such an anneal should thus be considered an essential step in the fabrication of a ferroelectric thin-film capacitor on Pt." @default.
• W2001662993 created "2016-06-24" @default.
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• W2001662993 date "2002-09-23" @default.
• W2001662993 modified "2023-09-25" @default.
• W2001662993 title "Dielectric loss peak due to platinum electrode porosity in lead zirconate titanate thin-film capacitors" @default.
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• W2001662993 doi "https://doi.org/10.1063/1.1509855" @default.
• W2001662993 hasPublicationYear "2002" @default.
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