Matches in SemOpenAlex for { <https://semopenalex.org/work/W2001663733> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W2001663733 abstract "As the wafer process requirements for the high grade devices are getting tighter than before, the requirements for the tighter accuracy of layer to layer among one device is dramatically increased up to the equipment specification itself that the equipment supplier propose thru their own test method. Eventhough the size of photomask is trend to the larger one as 6inch 25Omil and 7inch, still 5inch mask is the major product up to the l6mega memory device. Also, when we consider the required investment in wafer process to set up the large sized mask, the improvement of accuracy in 5inch mask is still realistic issue to the photomask manufacturer. In this paper, we evaluate the MEBES IV accuracy capability thru the acceptance test procedure of EFEC in 5inch mask and compare 5inch result with the 6inch result to clear the accuracy criteria of 5inch mask. Three major factors of position error which we suppose are identified using the factorial design of experiment. And the Ti super cassette is evaluated to clear the effect of cassette." @default.
- W2001663733 created "2016-06-24" @default.
- W2001663733 creator A5009656613 @default.
- W2001663733 creator A5056893189 @default.
- W2001663733 creator A5073671232 @default.
- W2001663733 creator A5089704428 @default.
- W2001663733 date "1994-11-03" @default.
- W2001663733 modified "2023-09-23" @default.
- W2001663733 title "MEBES IV position accuracy improvement on the 5-in. mask" @default.
- W2001663733 doi "https://doi.org/10.1117/12.191932" @default.
- W2001663733 hasPublicationYear "1994" @default.
- W2001663733 type Work @default.
- W2001663733 sameAs 2001663733 @default.
- W2001663733 citedByCount "0" @default.
- W2001663733 crossrefType "proceedings-article" @default.
- W2001663733 hasAuthorship W2001663733A5009656613 @default.
- W2001663733 hasAuthorship W2001663733A5056893189 @default.
- W2001663733 hasAuthorship W2001663733A5073671232 @default.
- W2001663733 hasAuthorship W2001663733A5089704428 @default.
- W2001663733 hasConcept C10138342 @default.
- W2001663733 hasConcept C111919701 @default.
- W2001663733 hasConcept C119599485 @default.
- W2001663733 hasConcept C127413603 @default.
- W2001663733 hasConcept C14737013 @default.
- W2001663733 hasConcept C160671074 @default.
- W2001663733 hasConcept C162324750 @default.
- W2001663733 hasConcept C171250308 @default.
- W2001663733 hasConcept C177264268 @default.
- W2001663733 hasConcept C192562407 @default.
- W2001663733 hasConcept C198082294 @default.
- W2001663733 hasConcept C199360897 @default.
- W2001663733 hasConcept C199639397 @default.
- W2001663733 hasConcept C200601418 @default.
- W2001663733 hasConcept C24326235 @default.
- W2001663733 hasConcept C2779227376 @default.
- W2001663733 hasConcept C41008148 @default.
- W2001663733 hasConcept C53524968 @default.
- W2001663733 hasConcept C78371743 @default.
- W2001663733 hasConcept C98045186 @default.
- W2001663733 hasConceptScore W2001663733C10138342 @default.
- W2001663733 hasConceptScore W2001663733C111919701 @default.
- W2001663733 hasConceptScore W2001663733C119599485 @default.
- W2001663733 hasConceptScore W2001663733C127413603 @default.
- W2001663733 hasConceptScore W2001663733C14737013 @default.
- W2001663733 hasConceptScore W2001663733C160671074 @default.
- W2001663733 hasConceptScore W2001663733C162324750 @default.
- W2001663733 hasConceptScore W2001663733C171250308 @default.
- W2001663733 hasConceptScore W2001663733C177264268 @default.
- W2001663733 hasConceptScore W2001663733C192562407 @default.
- W2001663733 hasConceptScore W2001663733C198082294 @default.
- W2001663733 hasConceptScore W2001663733C199360897 @default.
- W2001663733 hasConceptScore W2001663733C199639397 @default.
- W2001663733 hasConceptScore W2001663733C200601418 @default.
- W2001663733 hasConceptScore W2001663733C24326235 @default.
- W2001663733 hasConceptScore W2001663733C2779227376 @default.
- W2001663733 hasConceptScore W2001663733C41008148 @default.
- W2001663733 hasConceptScore W2001663733C53524968 @default.
- W2001663733 hasConceptScore W2001663733C78371743 @default.
- W2001663733 hasConceptScore W2001663733C98045186 @default.
- W2001663733 hasLocation W20016637331 @default.
- W2001663733 hasOpenAccess W2001663733 @default.
- W2001663733 hasPrimaryLocation W20016637331 @default.
- W2001663733 hasRelatedWork W1968603586 @default.
- W2001663733 hasRelatedWork W1976899923 @default.
- W2001663733 hasRelatedWork W1979542054 @default.
- W2001663733 hasRelatedWork W1989147337 @default.
- W2001663733 hasRelatedWork W1991211051 @default.
- W2001663733 hasRelatedWork W1999075110 @default.
- W2001663733 hasRelatedWork W2021355385 @default.
- W2001663733 hasRelatedWork W2040783691 @default.
- W2001663733 hasRelatedWork W2048344387 @default.
- W2001663733 hasRelatedWork W2057814066 @default.
- W2001663733 hasRelatedWork W2064308439 @default.
- W2001663733 hasRelatedWork W2065927495 @default.
- W2001663733 hasRelatedWork W2067674326 @default.
- W2001663733 hasRelatedWork W2086479765 @default.
- W2001663733 hasRelatedWork W2765973872 @default.
- W2001663733 hasRelatedWork W3094405331 @default.
- W2001663733 hasRelatedWork W1713852277 @default.
- W2001663733 hasRelatedWork W1966525156 @default.
- W2001663733 hasRelatedWork W2253304007 @default.
- W2001663733 hasRelatedWork W2740234837 @default.
- W2001663733 isParatext "false" @default.
- W2001663733 isRetracted "false" @default.
- W2001663733 magId "2001663733" @default.
- W2001663733 workType "article" @default.