FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2001695652> ?p ?o ?g. }

• W2001695652 endingPage "493" @default.
• W2001695652 startingPage "486" @default.
• W2001695652 abstract "Zirconium nitride (ZrN) thin films were grown on glass and aluminum substrates using a dual cathodic arc ion deposition technique. The effects of various negative bias voltages and flow ratios of N2/Ar on the stoichiometric ratio of nitrogen to zirconium (N/Zr), deposition rate, structure, surface morphology and electrical resistivity of the ZrN layer were investigated. Rutherford backscattering spectroscopy measurements indicated a drop in the deposition rate and a slight increase in stoichiometric ratio (N/Zr) with the increase of bias voltage up to −400 V, although the latter still remained slightly less than unity (~0.92). Deposition rate of the film showed an increase with the argon addition. X-ray diffraction patterns depicted mostly polycrystalline nature of the films, with preferential orientation of (2 0 0) planes in the −100 V to −300 V bias voltage range. For 70–50% nitrogen and at a bias voltage of −400 V, the (1 1 1) orientation of ZrN film predominated. The films were smoother at a lower bias of −100 V, while the roughness increased slightly at a higher bias voltage possibly due to (increased) preferential re-sputtering of zirconium-rich clusters/islands. Changes in the resistivity of the films were correlated with stoichiometry, crystallographic orientation and crystalline quality." @default.
• W2001695652 created "2016-06-24" @default.
• W2001695652 creator A5004475369 @default.
• W2001695652 creator A5014545613 @default.
• W2001695652 creator A5023726079 @default.
• W2001695652 creator A5049781965 @default.
• W2001695652 creator A5069076673 @default.
• W2001695652 date "2015-02-01" @default.
• W2001695652 modified "2023-10-11" @default.
• W2001695652 title "Structural and electrical resistivity characteristics of vacuum arc ion deposited zirconium nitride thin films" @default.
• W2001695652 cites W1968928134 @default.
• W2001695652 cites W1970921052 @default.
• W2001695652 cites W1980504091 @default.
• W2001695652 cites W1991190583 @default.
• W2001695652 cites W1992857022 @default.
• W2001695652 cites W1993473790 @default.
• W2001695652 cites W1996192608 @default.
• W2001695652 cites W1996792523 @default.
• W2001695652 cites W2014288350 @default.
• W2001695652 cites W2024382855 @default.
• W2001695652 cites W2027375504 @default.
• W2001695652 cites W2048297245 @default.
• W2001695652 cites W2059143019 @default.
• W2001695652 cites W2060042641 @default.
• W2001695652 cites W2070684846 @default.
• W2001695652 cites W2071142872 @default.
• W2001695652 cites W2077913977 @default.
• W2001695652 cites W2078961802 @default.
• W2001695652 cites W2079475325 @default.
• W2001695652 cites W2085103824 @default.
• W2001695652 cites W2087716589 @default.
• W2001695652 cites W2088529687 @default.
• W2001695652 cites W2162896543 @default.
• W2001695652 cites W2171836586 @default.
• W2001695652 cites W224031225 @default.
• W2001695652 cites W2911564564 @default.
• W2001695652 doi "https://doi.org/10.1016/j.mssp.2014.10.029" @default.
• W2001695652 hasPublicationYear "2015" @default.
• W2001695652 type Work @default.
• W2001695652 sameAs 2001695652 @default.
• W2001695652 citedByCount "17" @default.
• W2001695652 countsByYear W20016956522015 @default.
• W2001695652 countsByYear W20016956522016 @default.
• W2001695652 countsByYear W20016956522018 @default.
• W2001695652 countsByYear W20016956522019 @default.
• W2001695652 countsByYear W20016956522020 @default.
• W2001695652 countsByYear W20016956522021 @default.
• W2001695652 countsByYear W20016956522022 @default.
• W2001695652 countsByYear W20016956522023 @default.
• W2001695652 crossrefType "journal-article" @default.
• W2001695652 hasAuthorship W2001695652A5004475369 @default.
• W2001695652 hasAuthorship W2001695652A5014545613 @default.
• W2001695652 hasAuthorship W2001695652A5023726079 @default.
• W2001695652 hasAuthorship W2001695652A5049781965 @default.
• W2001695652 hasAuthorship W2001695652A5069076673 @default.
• W2001695652 hasConcept C113196181 @default.
• W2001695652 hasConcept C119599485 @default.
• W2001695652 hasConcept C121332964 @default.
• W2001695652 hasConcept C127413603 @default.
• W2001695652 hasConcept C137637335 @default.
• W2001695652 hasConcept C144082473 @default.
• W2001695652 hasConcept C159985019 @default.
• W2001695652 hasConcept C165801399 @default.
• W2001695652 hasConcept C171250308 @default.
• W2001695652 hasConcept C178790620 @default.
• W2001695652 hasConcept C185592680 @default.
• W2001695652 hasConcept C19067145 @default.
• W2001695652 hasConcept C191897082 @default.
• W2001695652 hasConcept C192562407 @default.
• W2001695652 hasConcept C194760766 @default.
• W2001695652 hasConcept C20254490 @default.
• W2001695652 hasConcept C22423302 @default.
• W2001695652 hasConcept C2778303786 @default.
• W2001695652 hasConcept C2778489163 @default.
• W2001695652 hasConcept C2779227376 @default.
• W2001695652 hasConcept C43617362 @default.
• W2001695652 hasConcept C534791751 @default.
• W2001695652 hasConcept C62520636 @default.
• W2001695652 hasConcept C69990965 @default.
• W2001695652 hasConceptScore W2001695652C113196181 @default.
• W2001695652 hasConceptScore W2001695652C119599485 @default.
• W2001695652 hasConceptScore W2001695652C121332964 @default.
• W2001695652 hasConceptScore W2001695652C127413603 @default.
• W2001695652 hasConceptScore W2001695652C137637335 @default.
• W2001695652 hasConceptScore W2001695652C144082473 @default.
• W2001695652 hasConceptScore W2001695652C159985019 @default.
• W2001695652 hasConceptScore W2001695652C165801399 @default.
• W2001695652 hasConceptScore W2001695652C171250308 @default.
• W2001695652 hasConceptScore W2001695652C178790620 @default.
• W2001695652 hasConceptScore W2001695652C185592680 @default.
• W2001695652 hasConceptScore W2001695652C19067145 @default.
• W2001695652 hasConceptScore W2001695652C191897082 @default.
• W2001695652 hasConceptScore W2001695652C192562407 @default.
• W2001695652 hasConceptScore W2001695652C194760766 @default.
• W2001695652 hasConceptScore W2001695652C20254490 @default.
• W2001695652 hasConceptScore W2001695652C22423302 @default.
• W2001695652 hasConceptScore W2001695652C2778303786 @default.
• W2001695652 hasConceptScore W2001695652C2778489163 @default.

• next