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- W2001815082 abstract "A new traceable method has been developed and investigated to experimentally determine the total amount of measuring deviations arising through the capture and demodulation of plane-mirror interferometer signals. The basic principle for such an analysis is the precise specification of length variations. However, either a measuring system of excellent accuracy or accurately defined movements within a stable platform are required. A common measuring motion can be achieved through the displacement of a reflecting wedge plate, which creates a constant step-down. The interferometer to be analyzed is used to determine the change in the wedge plate's thickness, which is caused by lateral movements controlled by another interferometer. The wedge's sampled surfaces demand high planarity as the change of thickness acts as the material measure. These conditions can be achieved by using the Nanopositioning and Nanomeasuring Machine in conjunction with a 0.5-degree tilted mirror placed on it. The interferometer to be analyzed is aligned with this mirror. To provide the highest possible linearity for lateral motion, the only measuring points are in nearly error-free lambda/2 steps of the interferometer. The NPM machine's already small deviations in positioning will only affect the evaluation of measuring errors of the reduced interferometer by a factor of about one-hundredth. This is one of the main advantages of the method. The interferometer to be analyzed - like the entire measuring setup - features a compact assembly and high mechanical and thermal stability. The measured deviations in linearity provide excellent verification of the prospected error influences." @default.
- W2001815082 created "2016-06-24" @default.
- W2001815082 creator A5030409039 @default.
- W2001815082 creator A5042034237 @default.
- W2001815082 creator A5048668300 @default.
- W2001815082 creator A5068043641 @default.
- W2001815082 creator A5086355320 @default.
- W2001815082 date "2006-08-14" @default.
- W2001815082 modified "2023-10-14" @default.
- W2001815082 title "A new traceable method for determination of periodic nonlinearities of interferometers" @default.
- W2001815082 doi "https://doi.org/10.1117/12.680613" @default.
- W2001815082 hasPublicationYear "2006" @default.
- W2001815082 type Work @default.
- W2001815082 sameAs 2001815082 @default.
- W2001815082 citedByCount "0" @default.
- W2001815082 crossrefType "proceedings-article" @default.
- W2001815082 hasAuthorship W2001815082A5030409039 @default.
- W2001815082 hasAuthorship W2001815082A5042034237 @default.
- W2001815082 hasAuthorship W2001815082A5048668300 @default.
- W2001815082 hasAuthorship W2001815082A5068043641 @default.
- W2001815082 hasAuthorship W2001815082A5086355320 @default.
- W2001815082 hasConcept C105795698 @default.
- W2001815082 hasConcept C107551265 @default.
- W2001815082 hasConcept C120665830 @default.
- W2001815082 hasConcept C121332964 @default.
- W2001815082 hasConcept C127162648 @default.
- W2001815082 hasConcept C15744967 @default.
- W2001815082 hasConcept C166689943 @default.
- W2001815082 hasConcept C184454961 @default.
- W2001815082 hasConcept C195251586 @default.
- W2001815082 hasConcept C22679943 @default.
- W2001815082 hasConcept C23576306 @default.
- W2001815082 hasConcept C33923547 @default.
- W2001815082 hasConcept C41008148 @default.
- W2001815082 hasConcept C47422493 @default.
- W2001815082 hasConcept C542102704 @default.
- W2001815082 hasConcept C62520636 @default.
- W2001815082 hasConcept C76155785 @default.
- W2001815082 hasConcept C77170095 @default.
- W2001815082 hasConceptScore W2001815082C105795698 @default.
- W2001815082 hasConceptScore W2001815082C107551265 @default.
- W2001815082 hasConceptScore W2001815082C120665830 @default.
- W2001815082 hasConceptScore W2001815082C121332964 @default.
- W2001815082 hasConceptScore W2001815082C127162648 @default.
- W2001815082 hasConceptScore W2001815082C15744967 @default.
- W2001815082 hasConceptScore W2001815082C166689943 @default.
- W2001815082 hasConceptScore W2001815082C184454961 @default.
- W2001815082 hasConceptScore W2001815082C195251586 @default.
- W2001815082 hasConceptScore W2001815082C22679943 @default.
- W2001815082 hasConceptScore W2001815082C23576306 @default.
- W2001815082 hasConceptScore W2001815082C33923547 @default.
- W2001815082 hasConceptScore W2001815082C41008148 @default.
- W2001815082 hasConceptScore W2001815082C47422493 @default.
- W2001815082 hasConceptScore W2001815082C542102704 @default.
- W2001815082 hasConceptScore W2001815082C62520636 @default.
- W2001815082 hasConceptScore W2001815082C76155785 @default.
- W2001815082 hasConceptScore W2001815082C77170095 @default.
- W2001815082 hasLocation W20018150821 @default.
- W2001815082 hasOpenAccess W2001815082 @default.
- W2001815082 hasPrimaryLocation W20018150821 @default.
- W2001815082 hasRelatedWork W1967069877 @default.
- W2001815082 hasRelatedWork W1982785973 @default.
- W2001815082 hasRelatedWork W2051133509 @default.
- W2001815082 hasRelatedWork W2070762245 @default.
- W2001815082 hasRelatedWork W2124683499 @default.
- W2001815082 hasRelatedWork W2794444136 @default.
- W2001815082 hasRelatedWork W3009817409 @default.
- W2001815082 hasRelatedWork W4251555668 @default.
- W2001815082 hasRelatedWork W4321273561 @default.
- W2001815082 hasRelatedWork W2135980133 @default.
- W2001815082 isParatext "false" @default.
- W2001815082 isRetracted "false" @default.
- W2001815082 magId "2001815082" @default.
- W2001815082 workType "article" @default.